Venting Procedure With Contaminants And/Or Corrosiv; Gases - With Purge/Vent Device Accessory - Agilent Technologies Turbo-V 750 TwisTorr Mode D'emploi

The described venting modality should be avoided because it may cause
CAUTION!
uncontrolled venting. A too rapid slow down of the rotor may seriously dam-age
the pump and void the pump warranty. Please, use the integrated purge/vent
device ac-cessory (969-6502) and Agilent "Controlled Vent Procedure" or contact
Agilent.
Venting Procedure with Contaminants and/or
Corrosive Gases – With Purge/Vent Device
Accessory
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Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01
Venting the Turbo-V 750/850 TwisTorr Pumping System
Close the process gases flowing into the sys-tem before sending
the STOP signal to the Turbo-V 750/850 TwisTorr Pumping
System;
Leaving the Turbo-V 750/850 TwisTorr Pump-ing System and the
backing pump running and the purge gas flowing, wait for
enough time to evacuate the process gases from the system (e.g.
to reach the typical basic process pressure);
Then close the gate valve connecting the Tur-bo pump to the
chamber (if present) and the valve connecting the Turbo pump to
the rough pump (if present);
Turn off the Turbo pump by sending the STOP signal to the
controller;
The Turbo-V 750/850 TwisTorr Pumping Sys-tem will
automatically start the "Auto Pump Speed" mode by default. This
means that the integrated vent valve will allow a flow of vent-ing
gas (e.g. Nitrogen), automatically actuated by the controller, in
order to slow the rotor down in controlled manner to a rotational
fre-quency of 100 Hz by adopting the SSR (Stop Speed Reading)
function. All other system op-erations (e.g. opening of the
additional system vent valve) should be carried out at rotational
frequencies of less than 100 Hz;
Technical Information
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