Agilent Technologies Turbo-V 750 TwisTorr Mode D'emploi page 389

Figure 79
Then screw the gas purge valve (with a torque of 2.5 Nm).
Adjust the pressure regulator in order to read a gas flow rate of 0.1 to
0.8 mbar l/s.
To prevent bearing damage, Agilent suggests a minimum purge gas flow rate of
CAUTION!
10 sccm (0.17 mbar l/s). This value can be exceeded, according to the process
requirements. Please contact Vari-an for specific applications.
The recommended gas flow maintains a pressure into the pump body
higher than the forevacuum pressure.
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01
Pump used with Corrosive Gases – Pump Purging
(A)
Technical Information
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