Venting Procedure With Contaminants And/Or Corrosiv; Gases - Without Purge/Vent Device Accessory - Agilent Technologies Turbo-V 750 TwisTorr Mode D'emploi

17 Technical Information
Venting the Turbo-V 750/850 TwisTorr Pumping System
Venting procedure with Contaminants and/or
Corrosive Gases – Without Purge/Vent Device
Accessory
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To safely slow down the pump use a venting flow able to decelerate the rotor at
CAUTION!
a rate lower than 5 Hz/s. To monitor the deceleration rate activate the "Stop
Speed Reading" function by serial line (WIN 167) and read the pump rotational
speed through WIN 232.
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394/406
Close the process gases flowing into the system before sending
the STOP signal to the Turbo-V 750/850 TwisTorr Pumping
System;
Leaving the Turbo-V 750/850 TwisTorr Pumping System and the
backing pump running and the purge gas flowing, wait for
enough time to evacuate the process gases from the system (e.g.
to reach the typical basic process pressure);
Then close the gate valve connecting the Turbo pump to the
chamber (if present);
Switch off the backing pump or close a fore-vacuum valve (if
present);
Turn off the Turbo pump by sending the STOP signal to the
controller;
Open the Turbo-V vent port (positioned on the envelope) slowly
until to reach atmospheric pressure in the system.
When the Turbo-V 750/850 TwisTorr Pumping System and the
backing pump are stopped and the system is at atmospheric
pressure, for a better bearing protection it is advisable to leave
the purge gas flowing into the Turbo V pump. In doing this, leave
the chamber or the Turbo-V vent valve (positioned on the
envelope) opened, to avoid system overpressures. If the vent
valve can't be kept opened, the backing pump should be left
operating;
For water cooling: shut off the water supply.
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01 (A)