Figure 77
Use the required number of screws:
Attach the units and tighten each screw in turn. Re-peat the
sequential tightening until the flange faces meet. Tighten the screws
with a torque of 20 Nm.
For ConFlat flange connections we recommend using Agilent
hardware.
To facilitate assembly and dismantling, apply Felpro C-100 high
temperature lubricant to the screw threads protruding from the
flange and between the nuts and flange.
Note that, in some cases, the connections can be made only with the
bolt in the lower side.
Exercise care when tightening nuts and bolts to avoid creating dents in the
CAUTION!
envelope as this may cause the pump rotor to lock.
Turbo-V 750/850 TwisTorr User Manual / 87-901-020-01
16 for CFF 6"
20 for CFF 8"
24 for CFF 110"
Technical Information
Connection of the High Vacuum Flange
(A)
17
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