17
Technical Information
TPS-Compact Outline
High Vaccum Flange Connection
To connect the Turbo pump to the ISO inlet flange, remove the outer
ring and position the centering ring as shown in the figure.
Figure 14
Then fix the two flanges with the clamps or claws as shown in the
figure.
Figure 15
For ConFlat flange connections we recommend using Agilent
hardware.
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