Scroll Pump Description - Agilent Technologies TPS-compact 969-8217 Notice De Mode D'emploi

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  • FRANÇAIS, page 37
17
Technical Information
Description of the TPS-Compact

Scroll Pump Description

The TPS-compact internal scroll creates vacuum using a simple dual
scroll mechanism in which one of the nested scrolls orbits about the
other, creating moving zones of captured gas.
Gas enters the scroll set at the perimeter and is displaced and
compressed toward the center hub where it is exhausted.
Figure 4
TPS-compact User Manual / 87-901-010-01
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