Agilent Technologies TPS-compact 969-8217 Notice De Mode D'emploi page 200

16 Instructions for Use
Installation
Tab. 1
FLANGE
ISO 63
ISO 100 K
ISO 160 K
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Agilent hardware. See
the appendix "Technical Information" for a detailed description.
The TPS-compact cannot be fixed by means of its base.
NOTE
For installation of optional accessories, see "Technical Information".
200/262
FIXING DEVICE
M10 clamps
M10 clamps
M10 clamps
TPS-compact User Manual / 87-901-010-01
N. FIXING TORQUE
4 22 Nm
4 22 Nm
4 22 Nm
(C)