Table des Matières
Publicité
60
50
Argon with Purge Open
40
Power Limit Applied [W]
30
20
10
0
10
15
Figure 7
The pump is balanced after assembly with a residual vibration
amplitude less than 0.01 µm.
The pump can operate in any position and must be supported on the
high vacuum flange. The connection of the forevacuum on the side of
the pump is a KF 40 NW flange.
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01
Argon with Purge Closed
20
25
30
T body [°C] (Win 216)
Technical Information
Description of the Turbo-V 3K-G
Nitrogen
35
40
(C)
17
Fail
"Pump Overtemp"
45
50
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Publicité
Table des Matières
