Use
This paragraph details the fundamental operating procedures. Make
all electrical an pneumatic connections before the use of the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 80 °C. While operating the pump the rotor
temperature must never exceed 120 °C.
The user must be sure to set the correct gas mode, according to the
pumped gas: 1 for N
means of 157 serial command. See the annex "Technical Information"
for details.
WARNING!
Never use the turbopump when the inlet flange is not connected to the
vacuum chamber or is not blanked. Do not touch the turbopump or any of its
accessories during the heating process. The high temperatures may cause
burns.
Avoid impacts, oscillations or harsh movements of the pump when in operation.
CAUTION!
The bearings may become damaged. Use air or inert gas free from dust or
particles for venting the pump. The pressure at the vent port must be less than 1
bar (above atmospheric pressure). For pumping gases containing particulate or
aggressive pollutants for the bearings, these pumps are fitted with a special port
to allow a steady flow of inert gas (like N
the appendix "Technical Information").
Never use the pump with corrosive gases or vapor to avoid damage to the internal
CAUTION!
materials of the pump.
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01
and lighter gases, 0 for Argon (default) by
2
, He) for pump bearing protection (see
2
Instructions for Use
(C)
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Use
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