Technical Specification - Agilent Technologies TV 1001 SEM Notice De Mode D'emploi

Technical Specification

Tab. 3
Pumping speed (with inlet screen)
Compression ratio
Base pressure
with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended
forepump
Operating position
Operating ambient
temperature
Bakeout temperature
Vibration level (Data measured
with an indicated bearing
temperature of 20 °C: see vibration
graph in the following figure)
Lubricant
Cooling requirements
TV 1001 SEM User Manual / 87-900-973-01 (H)

Technical Specification

N :
2
He:
H :
2
N
2
He
H
2
Technical Information
Technical Specification
ISO 200K / ISO 200F / CFF 10":
950 l/s
870 l/s
900 l/s
1 x 10
9
1 x 10
7
1 x 10
6
< 1 x 10 mbar
-10
(< 1 x 10 Torr)
-10
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump)
ISO 200K, ISO 200F, CFF 10"
KF 40 NW
38000 rpm
< 4 minutes
DS 402, TriScroll 300, IDP-15
Any
+5 °C to +35 °C
80° C at inlet flange max.
bearing peak: < 45 mm/sec
< 350 mm/sec (see the following typical
2
vibration graph)
permanent lubrication
Water
17
residual unbalance:
2
245/296