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17
Technical Information
Technical Specification
Technical Specification
Table 2
Technical Specification
Component
Pumping speed (without inlet screen)
Ar:
N
:
2
He:
H
:
2
Compression ratio
Ar:
N
2:
He:
H
:
2
Base pressure with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
250/304
Description
ISO 160:
750 l/s
810 l/s
950 l/s
680 l/s
>5 x 10
8
>5 x 10
7
> 4 x 10
4
1,5 x 10
4
> 1 x 10
mbar
-10
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test dome,
48 hours after the completion of test dome bake-out,
with a Turbopump fitted with a ConFlat flange and
using the recommended pre-vacuum pump)
ISO 160, ISO 200
KF 25 NW (ISO 160 inlet flange)
KF 40 NW (ISO 200 inlet flange)
45660 rpm
< 5 minutes
ISO 160: >20 m
/h (TriScroll 600, DS 602, HS 452,
3
HS 652)
ISO 200: >36 m
/h
3
Any
+5 °C to +35 °C
80° C at inlet flange max. (ISO flange)
< 0.01 µm at inlet flange
permanent lubrication
Turbo-V 1K-G User Manual / 87-901-025-01 (A)
ISO 200:
1040 l/s
1080 l/s
1150 l/s
730 l/s
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