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17
Technical Information
Technical Specification
Technical Specification
Tab. 2
Pumping speed (Intrinsic)
N
2
He
H
2
Total compression ratio versus
foreline:
N
2
He
H
2
Base pressure
(with recommended forepump)
Inlet flange
Nominal rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Cooling requirements
Forced air option
Coolant water
Bakeout temperature
Noise level
Pwr supply (mains):
Input voltage:
Input freq.:
Max input pwr:
Stand-by pwr:
210/266
Main port:
310 l/s
300 l/s
210 l/s
Main port:
>3 x 10
8
1.4 x 10
5
6 x 10
4
mechanical:
< 7 x 10
mbar (< 5.25 x 10
-10
diaphragm:
7 x 10
mbar (5.25 x 10
-8
-8
DN 100
60000 RPM
< 3 minutes
mechanical: Agilent DS 302
dry pump: Agilent SH 100
any
+ 5 °C to + 35 °C
Natural air convection Forced air or water optional
Typical flow: 140 m
/h
3
An internal supply is available (see para. "P4 – External fan")
flow: 200 l/h (0.89 GPM)
temperature: + 10 °C to + 30 °C
pressure: 3 to 5 bar (45 to 75 Psi)
80 °C at inlet flange max.
≤ 45 dB (A) at 1 meter
100 - 240 Vac
50 - 60 Hz
300 VA
10 W
TV 401/301 MS User Manual / 87-901-013-01 (B)
Side port:
400 l/s
380 l/s
300 l/s
Side port:
1 x 10
6
1.4 x 10
4
7 x 10
3
Torr)
-10
Torr)
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