ISTRUZIONI ORIGINALI
Characteristic
Turbo Pump
TMP Flange
Forepump
Voltage
Base Pressure *
N2 Pumping Speed (L/s)
He Pumping Speed (L/s)
H2 Pumping Speed (L/s)
TMP Rotational Speed
Start-up time
Operating Position
Ambient Temperature
Bakeout Temperature
Protection Breaker
Compliance with
Installation category
Pollution Degree
Serial Communication kit
Storage Temperature
* According to standard DIN 28 428, the base pressure is that measured in a leak-free test dome, 48 hours after the com-
pletion of test dome bake-out, with a Turbopump fitted with a ConFlat flange.
When the TPS-mobile has been stored at a temperature less than 5°C, wait until the TPS-mobile has reached the above
mentioned temperature.
Conformity Certificate
Varian S.p.A. declares, under its own responsibility, that this product complies with the essential safety re-
quirements indicated by the Machinery Directive 2006/42/CE, by Electromagnetic Compatibility Directive
2004/108/CE and by the Low Voltage Directive 2006/95/CE. The compliance of the above mentioned product
with the standards of Table 1 is hereby guaranteed.
EN 61010-1
EN 61326-1
EN 1012-2
EN 12100-1
EN 12100-2
969-8427
969-8426
TV301
ISO100
IDP3
SEE "CE" CERTIFICATE OF CONFORMITY
NOTE
TABLE 1
Safety requirements for electrical equipment for measurement
2001
control and laboratory use
Electrical equipment for measurement control and laboratory
2006
use EMC requirements
Compressors and vacuum pumps - Safety requirements -
2009
Part 2: vacuum pumps
Safety of machinery - Basic concepts, general principles for
2009
design – Part 1 : basic terminology, methodology
Safety of machinery - Basic concepts, general principles for
2009
design – Part 2 : technical principles
92/105
TECHNICAL INFORMATION
969-8425
TV301
TV301
ISO100
ISO100
DS402
DS302
110V / 60Hz
1x10-8mbar (7.5x10-9Torr)
250
220
200
56000 rpm
<3 min.
On a flat floor
+5°C to +35°C
max 80°C on Inlet Flange
14A
II
2
T-Plus
-20°C to +70°C
969-8424
TV301
ISO100
DS102
87-901-005-01(A)