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Agilent Technologies 9190520 Notice De Mode D'emploi
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Agilent Technologies 9190520 Notice De Mode D'emploi

Agilent Technologies 9190520 Notice De Mode D'emploi

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2 l/s Ion Pump
Models
9190520, 9190521, 9190522,
9190523, 9190524
Magnet 9190038
Manuale di Istruzioni
Bedienungshandbuch
Notice de Mode d'Emploi
User Manual
87-900-091-01 (E)
06/2017

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  • Page 1 2 l/s Ion Pump Models 9190520, 9190521, 9190522, 9190523, 9190524 Magnet 9190038 Manuale di Istruzioni Bedienungshandbuch Notice de Mode d’Emploi User Manual 87-900-091-01 (E) 06/2017...
  • Page 2 Use, duplication or disclosure of Software is subject to The material contained in this Agilent Technologies’ standard © Agilent Technologies, Inc. 2017 document is provided “as is,” and is commercial license terms, and non- subject to being changed, without...
  • Page 3 2 l/s Ion Pump 2 l/s Ion Pump 2 l/s Ion Pump User Manual / 87-900-091-01 (E) 3/68...
  • Page 4 2 l/s Ion Pump 4/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)

  • Page 5: Table Des Matières

    Contents Contents Istruzioni per l’uso 7 Informazioni generali Preparazione per l'installazione 9 Installazione Uso 12 Manutenzione 14 Smaltimento Gebrauchsanleitung 17 Allgemeine Hinweise Vor der Installation 19 Installation 20 Gebrauch Wartung Entsorgung 25 Mode d’emploi Indications Generales Préparation de l'installation 29 Installation 30 Utilisation 32 2 l/s Ion Pump User Manual / 87-900-091-01 (E)
  • Page 6 Contents Maintenance Mise au rebut Instructions for Use 37 General Information 38 Preparation for Installation 39 Installation 40 Use 42 Maintenance Disposal Technical Information 47 Description of the Pump 48 Operating Notes 50 Technical Specification 51 Outline Drawing 53 Installation 56 Pump Installation Control Unit Connection 58 Bakeout...

  • Page 7: Istruzioni Per L'uso

    2 l/s Ion Pump User Manual Istruzioni per l’uso Informazioni generali 8 Preparazione per l'installazione 9 Installazione Procedure di uso 13 Manutenzione Smaltimento Traduzione delle istruzioni originali 7/68...

  • Page 8: Informazioni Generali

    Istruzioni per l’uso Informazioni generali Informazioni generali Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Agilent prima dell'utilizzo dell'apparecchiatura. La Agilent si ritiene sollevata da eventuali responsabilità dovute all'inosservanza totale o parziale delle istruzioni, ad uso improprio da parte di personale non addestrato, ad interventi non autorizzati o ad uso contrario alle normative nazionali specifiche.

  • Page 9: Preparazione Per L'installazione

    Istruzioni per l’uso Preparazione per l'installazione Preparazione per l'installazione La pompa viene fornita in un imballo protettivo speciale; se si presentano segni di danni, che potrebbero essersi verificati durante il trasporto, contattare l'ufficio vendite locale. Durante l'operazione di disimballaggio, prestare particolare attenzione a non lasciar cadere la pompa e a non sottoporla ad urti o vibrazioni.

  • Page 10: Installazione

    Istruzioni per l’uso Installazione Figura 1 Installazione Non installare e/o utilizzare la pompa in ambienti esposti ad agenti atmosferici (pioggia, gelo, neve), polveri, gas aggressivi, in ambienti esplosivi o con elevato rischio di incendio. Durante il funzionamento, per ottenere le specifiche tecniche dichiarate, la temperatura ambiente deve essere compresa tra 0 °C e +85 °C.
  • Page 11 Istruzioni per l’uso Installazione AVVERTENZA! Per evitare lesioni alla persona, non collegare l’alta tensione alla pompa prima che sia installata nel sistema e che tutte le flange di ingresso siano adeguatamente collegate o chiuse. Il rispetto delle normative di sicurezza nell’uso delle pompe è garantito solo con ATTENZIONE! l’uso delle unità...

  • Page 12: Uso

    Istruzioni per l’uso La pompa può essere installata in qualsiasi posizione. Per convenienza normalmente viene montata in posizione verticale con la flangia di ingresso in alto, o in posizione orizzontale. Le pompe possono anche essere mantenute sospese in ogni posizione tramite la loro flangia di ingresso.

  • Page 13: Procedure Di Uso

    Istruzioni per l’uso Procedure di uso Osservare la seguente procedura per l’uso della pompa: Tramite una pompa di pre-vuoto portare il sistema ad una pressione di 1x10 mbar od inferiore. Collegare l’unità di controllo ad una apposita fonte di alimentazione ed accenderla. Lasciare la valvola di pre-vuoto aperta durante l’avvio della pompa ionica finchè...

  • Page 14: Manutenzione

    Istruzioni per l’uso Manutenzione Manutenzione Le pompe della serie 2 l/s non richiedono alcuna manutenzione. Qualsiasi intervento deve essere eseguito da personale autorizzato. AVVERTENZA! Prima di effettuare qualsiasi intervento sulla pompa scollegarla dall’alta tensione. Qualora una pompa dovesse essere rottamata, procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche.

  • Page 15: Smaltimento

    Istruzioni per l’uso Smaltimento Smaltimento Significato del logo "WEEE" presente sulle etichette Il simbolo qui sotto riportato applicato in ottemperanza alla direttiva CE denominata "WEEE". Questo simbolo (valido solo per i paesi della Comunità Europea) indica che il prodotto sul quale è applicato, NON deve essere smaltito insieme ai comuni rifiuti domestici o industriali, ma deve essere avviato ad un sistema di raccolta differenziata.
  • Page 16 Istruzioni per l’uso Smaltimento 16/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)

  • Page 17: Gebrauchsanleitung

    2 l/s Ion Pump User Manual Gebrauchsanleitung Allgemeine Hinweise 18 Vor der Installation Installation Gebrauch Bedienungsschritte Wartung Entsorgung Übersetzung der Originalanleitungen 17/68...

  • Page 18: Allgemeine Hinweise

    Gebrauchsanleitung Allgemeine Hinweise Allgemeine Hinweise Dieses Gerät ist für den professionellen Gebrauch bestimmt. Vor dem Gebrauch soll der Benutzer dieses Handbuch sowie alle weiteren von Agilent mitgelieferten Zusatzdokumentationen genau lesen. Bei vollständiger bzw. teilweiser Nichtbeachtung der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der nationalen Bestimmungen übernimmt Firma Agilent keinerlei Haftung.

  • Page 19: Vor Der Installation

    Gebrauchsanleitung Vor der Installation Vor der Installation Die Pumpe wird in einer speziellen Schutzverpackung geliefert. Eventuelle Transportschäden sind der zuständigen örtlichen Verkaufsstelle zu melden. Beim Auspacken vorsichtig vorgehen, damit die Pumpe nicht fällt oder Stößen oder Vibrationen ausgesetzt wird. Das Verpackungsmaterial ist ordnungsgemäß zu entsorgen. Es ist vollständig recyclebar und entspricht der EG-Richtlinie 85/399 für den Umweltschutz.

  • Page 20: Installation

    Gebrauchsanleitung Installation Abbildung 1 Installation Die Pumpe darf nicht in Umgebungen installiert und/oder benutzt werden, die ungeschützt vor Witterungsbedingungen (Regen, Frost, Schnee), Staub und aggressiven Gasen sind, und in denen Explosions- und erhöhte Brandgefahr besteht. Während des Betriebes soll die Umgebungstemperatur zwischen 0 °C und +85 °C betragen, um die angegebenen technischen Merkmale zu gewährleisten.
  • Page 21 Gebrauchsanleitung Installation WARNUNG! Um Personenschäden zu vermeiden, darf die Hochspannungsleitung der Pumpe erst angeschlossen werden, wenn die Pumpe im System installiert ist und alle Eintrittsflansche entsprechend angeschlossen oder geschlossen sind. FALSCH! Die Einhaltung der Sicherheitsvorschriften im Gebrauch der Pumpen wird nur VORSICHT! durch den Einsatz der Kontroll-und Verkabelungssysteme Agilent garantiert.

  • Page 22: Gebrauch

    Gebrauchsanleitung Gebrauch Die Pumpe kann in einer beliebigen Position installiert werden. Aus praktischen Gründen wird sie in der Regel senkrecht mit nach oben gerichtetem Eintrittsflansch oder waagerecht eingebaut. Die Pumpen können auch in einer beliebigen Position an ihrem Eintrittsflansch hängend eingebaut werden. Detaillierte Informationen zur Installation der Pumpe sind dem Anhang “Technical Information”...

  • Page 23: Bedienungsschritte

    Gebrauchsanleitung Gebrauch Bedienungsschritte Beachten Sie das folgende Verfahren für die Verwendung der Pumpe: Mittels einer Vorvakuumpumpe das System auf einen Druck von 1x10 mbar oder einen niedrigeren Druck bringen. Die Steuereinheit an eine entsprechende Versorgungsquelle anschließen und einschalten. Während des Anlaufes der Ionenpumpe soll das Vorvakuumventil geöffnet bleiben, bis ein angemessener Anlaufdruck erreicht ist.

  • Page 24: Wartung

    Gebrauchsanleitung Wartung Wartung Die Pumpen der Serie 2 l/s erfordern keine Wartung. Sämtliche Eingriffe dürfen nur von autorisiertem Personal vorgenommen werden. WARNUNG! Vor Eingriffen an der Pumpe ist diese von der Hochspannungsquelle zu trennen. Bei eventueller Verschrottung einer Pumpe ist diese entsprechend der einschlägigen nationalen Vorschriften zu entsorgen.

  • Page 25: Entsorgung

    Gebrauchsanleitung Entsorgung Entsorgung Bedeutung des "WEEE" Logos auf den Etiketten. Das folgende Symbol ist in Übereinstimmung mit der EU-Richtlinie WEEE (Waste Electrical and Electronic Equipment) angebracht. Dieses Symbol (nur in den EU-Ländern gültig) zeigt an, dass das betreffende Produkt nicht zusammen mit Haushaltsmüll entsorgt werden darf sondern einem speziellen Sammelsystem zugeführt werden muss.
  • Page 26 Gebrauchsanleitung Entsorgung 26/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)

  • Page 27: Mode D'emploi

    2 l/s Ion Pump User Manual Mode d’emploi Indications Generales 28 Préparation de l'installation 29 Installation Utilisation Procédure d’utilisation 33 Maintenance Mise au rebut Traduction de la mode d’emploi originale 27/68...

  • Page 28: Indications Generales

    Mode d’emploi Indications Generales Indications Generales Cet appareillage a été conçu en vue d’une utilisation professionnelle. Il est conseillé à l’utilisateur de lire attentivement cette notice d’instructions ainsi que toute autre indication supplémentaire fournie par Agilent avant d’utiliser l’appareil. Agilent décline toute responsabilité...

  • Page 29: Préparation De L'installation

    Mode d’emploi Préparation de l'installation Préparation de l'installation La pompe est fournie dans un emballage de protection spécial; si l'on constate des signes d’endommagement imputables au transport, contacter aussitôt le revendeur local. Pendant l'opération de déballage, veiller tout particulièrement à ne pas laisser tomber la pompe et à...

  • Page 30: Installation

    Mode d’emploi Installation Figure 1 Installation Ne pas installer et/ou utiliser la pompe dans des milieux exposés à des agents atmosphériques (pluie, gel, neige), à des poussières, à des gaz de combat ainsi que dans des milieux explosifs ou à fort risque d'incendie.
  • Page 31 Mode d’emploi Installation AVERTISSEMENT! Pour éviter toute lésion aux personnes, ne pas brancher la haute tension à la pompe avant que celle-ci soit installée dans le système et avant que toutes les brides d’entrées soient correctement assemblées ou fermées. Lors de l'utilisation des pompes, le respect des normes de sécurité n'est garanti ATTENTION! que par l'usage des unités de contrôle et des câbles Agilent.

  • Page 32: Utilisation

    Mode d’emploi Utilisation La pompe peut être installée dans toutes les positions. Par facilité elle est généralement montée en position verticale avec bride d’entrée en partie haute, ou en position horizontale. Les pompes peuvent également être suspendues dans toutes les positions à...

  • Page 33: Procédure D'utilisation

    Mode d’emploi Utilisation Procédure d’utilisation Observer la procédure suivante pour l’utilisation de la pompe: A l’aide d’une pompe de pré-vide, porter le système à une pression de 1x10 mbars ou inférieure. Brancher l’unité de contrôle à une source d’alimentation appropriée et l’allumer. Laisser la soupape de pré-vide ouverte pendant le démarrage de la pompe ionique tant qu’une pression de démarrage appropriée n’a pas été...

  • Page 34: Maintenance

    Mode d’emploi Maintenance Maintenance Les pompes de la série 2 l/s ne demandent aucun entretien. Toute intervention doit être exécutée par un personnel agréé. AVERTISSEMENT! Avant toute intervention sur la pompe, la débrancher de la haute tension. En cas de mise au rebut d’une pompe, procéder à son élimination dans le respect des normes nationales en vigueur.

  • Page 35: Mise Au Rebut

    Mode d’emploi Mise au rebut Mise au rebut Signification du logo "WEEE" figurant sur les étiquettes Le symbole ci-dessous est appliqué conformément à la directive CE nommée "WEEE". Ce symbole (uniquement valide pour les pays de la Communauté européenne) indique que le produit sur lequel il est appliqué NE doit PAS être mis au rebut avec les ordures ménagères ou les déchets industriels ordinaires, mais passer par un système de collecte sélective.
  • Page 36 Mode d’emploi Mise au rebut 36/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)

  • Page 37: Instructions For Use

    2 l/s Ion Pump User Manual Instructions for Use General Information Preparation for Installation 39 Installation Operating Procedure Maintenance Disposal Original Instructions 37/68...

  • Page 38: General Information

    Instructions for Use General Information General Information This equipment is destined for use by professionals. The user should read this instruction manual and any other additional information supplied by Agilent before operating the equipment. Agilent will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards.

  • Page 39: Preparation For Installation

    Instructions for Use Preparation for Installation Preparation for Installation The pump is supplied in a special protective packing. If this shows signs of damage which may have occurred during transport, contact your local sales office. When unpacking the pump, be sure not to drop it and avoid any kind of sudden impact or shock vibration to it.

  • Page 40: Installation

    Instructions for Use Installation Figure 1 Installation Do not install or use the pump in an environment exposed to atmospheric agents (rain, snow, ice), dust, aggressive gases, or in explosive environments or those with a high fire risk. During operation, to obtain the declared functioning specification, the ambient temperature must be between 0 °C and +85 °C.
  • Page 41 Instructions for Use Installation WARNING! To avoid injury, never connect the high voltage to the pump before it is installed into the system and all the inlet flanges are properly connected or blanked off. The safety specifications agreement using the pump is guaranteed using the CAUTION! Agilent controller and cable only.

  • Page 42: Use

    Instructions for Use The pump can be installed in any position. For convenience, a pump is usually mounted vertically with the inlet up, or placed horizontally. Pumps can be supported by the mounting flange in any position. For detailed information about the pump installation, see the appendix “Technical Information”.

  • Page 43: Operating Procedure

    Instructions for Use Operating Procedure Follow the procedure below when operating the pump: With a clean roughing pump, establish a roughing pressure of 1x10 mbar or lower in the vacuum system. Plug the control unit into a suitable power source and switch the power ON.

  • Page 44: Maintenance

    Instructions for Use Maintenance Maintenance The 2 l/s series pumps do not require any maintenance. Any work performed on the pump must be carried out by authorized personnel. WARNING! Before carrying out any work on the pump, disconnect it from the High Voltage supply.

  • Page 45: Disposal

    Instructions for Use Disposal Disposal Meaning of the "WEEE" logo found in labels The following symbol is applied in accordance with the EC WEEE (Waste Electrical and Electronic Equipment) Directive. This symbol (valid only in countries of the European Community) indicates that the product it applies to must NOT be disposed of together with ordinary domestic or industrial waste but must be sent to a differentiated waste collection system.
  • Page 46 Instructions for Use Disposal 46/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)

  • Page 47: Technical Information

    2 l/s Ion Pump User Manual Technical Information Description of the Pump Operating Notes 50 Technical Specification 51 Outline Drawing 53 Installation Pump Assembling 56 Pump Installation 57 Control Unit Connection Bakeout Unusual Operating Conditions Pump Troubleshooting 61 2 l/s Pump Replacement Parts and Accessories Original Instructions 47/68...

  • Page 48: Description Of The Pump

    10 to less than 10 mbar. A roughing pump is needed to lower the system pressure from atmosphere to below 10 mbar. Figure 2 Model 9190520 Figure 3 Model 9190521 48/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)
  • Page 49 Technical Information Description of the Pump Figure 4 Model 9190522 Figure 5 Model 9190523 Figure 6 Model 9190524 Figure 7 Magnet model 9190038 Figure 8 Pump main assemblies l/s Ion Pump / 87-900-091-01 49/68...

  • Page 50: Operating Notes

    Technical Information Operating Notes Operating Notes VacIon pumps operate as a single-cell Penning discharge. A potential of about 3 kV is applied to the anode cell; the cathodes are at ground potential. Electrons are constrained from going directly to the anode by the presence of an axial magnetic field of about 1200 gauss.

  • Page 51: Technical Specification

    Technical Information Technical Specification Technical Specification The following table details the main technical specifications of the 2 l/s Ion Pump. Tab. 2 Nominal pumping speed for Nitrogen (l/s) Operating life at 5x10 mbar (hours) 8000 Operating voltage +3300 Vdc +/- 10 % Maximum starting pressure (mbar) 1x10 Ultimate pressure (mbar)
  • Page 52 Technical Information Technical Specification Figure 9 Pressure vs Current curve 52/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)

  • Page 53: Outline Drawing

    Technical Information Outline Drawing Outline Drawing The following figure shows the outline drawing for the 2 l/s pump and the magnet (all dimensions are in inches [mm]). Figure 10 Model 9190520 Figure 11 Model 9190521 l/s Ion Pump / 87-900-091-01 53/68...
  • Page 54 Technical Information Outline Drawing Figure 12 Model 9190522 Figure 13 Model 9190523 54/68 2 l/s Ion Pump User Manual / 87-900-091-01 (E)
  • Page 55 Technical Information Outline Drawing Figure 14 Model 9190524 Figure 15 Magnet model 9190038 l/s Ion Pump / 87-900-091-01 55/68...

  • Page 56: Installation

    Technical Information Installation Installation Pump Assembling Before installing the pump into the system, the pump must be assembled. To assemble the pump, proceed as follows (see the following figure): Remove the pump parts from the packaging. Remove the fixing clip (3) from the magnet (2). Insert the pump (1) into the magnet.

  • Page 57: Pump Installation

    Technical Information Pump Installation Pump Installation To install the pump into the system proceed as follows: During installation, keep the pump and system clean. Avoid touching surfaces which will ultimately be under vacuum. When the VacIon pump is open to the atmosphere, take care to avoid introducing foreign particles, oil, solder flux, or any volatile substances.

  • Page 58: Control Unit Connection

    Technical Information Control Unit Connection Control Unit Connection WARNING! The high voltage present in the high voltage cable which connects the control unit to the ion pump, can cause severe injury or death. Before mounting the high voltage connector of the cable on the pump high voltage feedthrough, or before removing it, be sure the main power is removed from the control unit.

  • Page 59: Bakeout

    Technical Information Bakeout To disconnect the coaxial high voltage cable from the controller, slide the safety locking sleeve (very little sleeve travel is required) from the control unit and at the same time pull on the male end of the cable connector to remove it from the socket on the control unit.
  • Page 60 Technical Information Bakeout To restart the discharge, tap the pump body with a penny held between the thumb and forefinger, or heat the pump body locally with a small soldering iron. This should liberate surface gas within the pump and restart the discharge. NEVER strike the pump with hand tools.

  • Page 61: Pump Troubleshooting

    Technical Information Pump Troubleshooting Pump Troubleshooting In the event of a power failure (momentary or long period) the controller is switched off. When power is restored, the controller will automatically restart. Tab. 3 SYMPTOM POSSIBLE CAUSE CORRECTION PROCEDURE Slow starting (more than Air leaks which limit pressure to Leak check the vacuum system 30 minutes).

  • Page 62: L/S Pump Replacement Parts And Accessories

    Technical Information 2 l/s Pump Replacement Parts and Accessories 2 l/s Pump Replacement Parts and Accessories Tab. 4 PART NUMBER Basic pump 9190520 9190521 9190522 9190523 9190524 Magnet Samarium-Cobalt 9190038 CABLES HV Bakeable cable, radiation resistant, 9290706 13' (4 m) long with safety interlock For a complete overview of Agilent's extensive vacuum product line, please refer to the Agilent Vacuum Catalogue.
  • Page 68 Agilent Vacuum Products Division/Sales and Service Offices United States India (Sales) India (Service) Agilent Technologies Agilent Technologies India Pvt. Ltd. Agilent Technologies India Pvt. Ltd. 121 Hartwell Avenue Unit Nos 110- 116, & Part of 101 & 109 C-Block, RMZ Centennial Plot Number- 8A, 8B, 8C,...

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