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17
Technical Information
Pump Purging and Venting
How to Purge the Turbo-V 3K-G Pump
To supply the inert purge gas (e. g. nitrogen) to the pump through the
purge port, connect a gas purge line to the pump.
The purging device automatically provides about 20 sccm when fed
with 1 bar (14 psi) absolute (atmospheric pressure).
To prevent bearing damage, Agilent suggests a minimum purge gas flow rate of
CAUTION!
20 sccm (0.33 mbar l/s). This value can be exceeded, according to the process
requirements. Please contact Vari-an for specific applications.
How to Vent the Turbo-V 3K-G Pump
The recommended procedure to vent the system is described in the
following points:
1
2
3
4
5
350/360
Close the process gases flowing into the system before sending
the STOP signal to the Turbo-V 3K-G pump.
Leaving the Turbo-V 3K-G pump and the backing pump running
and the purge gas flowing, wait for enough time to evacuate the
process gases from the system (e.g. to reach the typical basic
process pressure).
Then close the gate valve connecting the Turbo pump to the
chamber (if present) and the valve connecting the Turbo pump to
the rough pump (if present).
Turn off the Turbo pump by sending the STOP signal to the
controller.
The Turbo-V 3K-G pump will automatically start the "Controlled
Venting Procedure" by default. This means that the integrated
vent valve will allow a flow of venting gas (e.g. Ni-trogen),
automatically actuated by the controller, in order to slow the
rotor down in controlled manner to a rotational frequency of 100
Hz by adopting the SSR (Stop Speed Reading) function. All other
system operations should be carried out at rotational frequencies
of less than 100 Hz.
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01 (D)
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