17
Technical Information
Description of the Turbo-V 3K-G
60
0
50
0
Argon with Purge Open
40
0
Power Limit Applied [W]
30
0
20
0
10
0
0
10
15
The pump is balanced after assembly with a residual vibration
amplitude less than 0.01 µm.
The pump can operate in any position and must be supported on the
high vacuum flange. The connection of the forevacuum on the side of
the pump is a KF 40 NW flange.
304/360
Argon with Purge Closed
20
25
30
T body [°C] (Win 216)
Turbo-V 3K-G Pumping System User Manual / 87-901-011-01 (D)
Nitrogen
35
40
Fail
"Pump Overtemp"
45
50