17
Technical Information
Technical Specification
Characteristic
Turbo Pump
TMP Flange
Forepump
Voltage
Base Pressure *
N
Pumping Speed (L/s)
2
He Pumping Speed (L/s)
H
Pumping Speed (L/s)
2
TMP Rotational Speed
Start-up time
Operating Position
Ambient Temperature
Bakeout Temperature
Protection Breaker
Installation category
Pollution Degree
Compliance with:
Indoor Use Only
Max altitude 2000m
Serial Communication kit
Storage Temperature
* According to standard DIN 28 428, the base pressure is that measured in a leakfree test dome, 48
hours after the completion of test dome bake-out, with a Turbopump fitted with a ConFlat flange.
348/400
9698423
74 FS
ISO63
IDP-7
IDP-7: 5x10
mbar (3.75x10
-9
max 80 °C on Inlet Flange
EN 55011 (Class A Group 1)
EN 61326-1
EN 61010-1
EN 1012-2
EN 12100
TPS-mobile User Manual / 87-901-005-01 (F)
9698422
74 FS
ISO63
IDP-3
110 V / 60 Hz
Torr) / DS102: 5x10
-9
-10
48 (with inlet screen)
44 (with inlet screen)
32 (with inlet screen)
70000 rpm
<2 min.
On a flat floor
+5 °C to +35 °C
14A
II
2
T-Plus
-20 °C to +70 °C
9698421
74 FS
ISO63
DS102
mbar (3.75x10
Torr)
-10