16
Instructions for Use
Installation
If TPS-mobile is equipped with turbo-molecular pumps of smaller or
the same size as TwisTorr 304 FS, the pump can be turned on even if
installed on TPS-mobile. If TPS-mobile is equipped with pumps of
sizes bigger than 304 FS, it can be used only to enable the pump
(turbo pump off) that must be installed by means of its inlet flange in
the customer's system prior to activate TPS-mobile.
FLANGE
ISO 63
ISO 100 K
ISO 160 K
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Agilent hardware. See
the appendix "Technical Information" for a detailed description.
The TPS-mobile cannot be fixed by means of its base.
NOTE
For installation of optional accessories, see "Technical Information".
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FIXING DEVICE
M10 clamps
M10 clamps
M10 clamps
TPS-mobile User Manual / 87-901-005-01 (F)
N.
FIXING TORQUE
4
22 Nm
4
22 Nm
4
22 Nm