GENERAL NOTES
Symbols
The following symbols are used in these operating instructions:
marks a work step that you must carry out.
ATTENTION!
marks notes on whose non-observance your health or the
functioning of the device will be endangered.
NOTE
marks important additional information, tips and
recommendations.
Safety notes
Please observe the notes in these operating instructions together with the
conditions of use and permitted data that are specified in the data sheets of the
Mass Flow Controller (MFC) or Mass Flow Meter (MFM), in order that the device
will function perfectly and remain operable for a long time:
•
Keep to standard engineering rules in planning the use of and operating the
device!
•
Installation and maintenance is only allowed by specialist personnel using
suitable tools!
•
Observe the current regulations on accident prevention and safety for
electrical devices during operation and maintenance of the device!
•
Before interfering with the system, always switch off the voltage!
•
Take suitable precautions to prevent unintended operation or damage by
unauthorized action!
•
On non-observance of this note and unauthorized interference with the
device, we will refuse all liability and the guarantee on device and
accessories will become void!
Protection from damage by electrostatic charging
ATTENTION
EXERCISE CAUTION ON
HANDLING!
ELECTROSTATICALLY
SENSITIVE COMPONENTS/
MODULES
This device contains electronic components that are
sensitive to electrostatic discharge (ESD). Contact
to electrostatically charged persons or objects will
endanger these components. In the worst case,
they will be immediately destroyed or will fail after
commissioning.
Observe the requirements of EN 100 015 - 1 in
order to minimize the possibility of, or avoid, damage
from instantaneous electrostatic discharge. Also
take care not to touch components that are under
supply voltage.
MFC/MFM - 3