System Description; Type Systematics; General Function - Burkert 8626 Instructions De Service

SYSTEM DESCRIPTION

Type systematics

These Operating Instructions contain information for the following Mass Flow
Controllers (MFC) and Mass Flow Meters (MFM) from the Bürkert product range:
Type Type End value range
no.
referred to air
8626 MFC
8006 MFM
8716 MFC
8706 MFM
8712 MFC
8702 MFM
8710 MFC
8700 MFM
1 ) Please observe in this connection the note on the device types 8626 / 8006 in the section Connection
Configuration Type 8626/8006.
2 ) CMOSens ® is a registered trademark of Sensirion AG (Switzerland)

General function

The MFCs of Types 8626, 8716, 8712 and 8710 are compact devices with which
the mass flow of gases is controlled. They control to a preset setpoint value,
independent of disturbances such as pressure variations or flow resistances that
vary with time, e.g. as a result of filter contamination.
The MFCs contain the components flow rate sensor (Q sensor), electronics (with
the functions signal processing, control and valve drive), and a proportional
solenoid valve as the servo component.
w x =w-x
d
x
controller
p
Q sensor
Fig.: Components of a Mass Flow Controller
Q (l /min)
nom N
/ N
2
25 ... 1500
25 ... 1500
25 ... 1500
25 ... 1500
0.02 ... 50 Bypass CMOSens
0.02 ... 50 Bypass CMOSens
0.05 ... 30 Bypass standard
0.05 ... 30 Bypass standard
y
servo
component
Sensor Remarks
Inline for devices from
Jan. 2003
Inline for devices from
Jan. 2003
Inline
Inline
® 2)
® 2)
x
out
MFC/MFM - 5
1)
1)