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Agilent Technologies Turbo-V 1K-G Notice De Mode D'emploi page 296

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Technical Information
Pump Used With Corrosive Gases
5
296/304
When the Turbo-V pump and the backing pump are stopped and
the system is at atmospheric pressure, for a better bearing
protection it is advisable to leave the purge gas flowing into the
Turbo-V pump, with the chamber or the Turbo-V vent valve
opened, to avoid system overpressures. If the vent valve can't be
kept opened, the backing pump should be left operating.
7
1
2
3
1
Purge gas line
2
Pressure regulator
3
Gas purge valve
4
Gas purge port
5
Forevacuum pump
6
Turbopump
7
Vent valve
4
Turbo-V 1K-G User Manual / 87-901-025-01 (A)
6
5

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