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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
Brooks
VDM300 Vapor Delivery Module
®
October, 2018
1-7 Description
The VDM300 is a self-contained, ultra-high purity vapor delivery module
providing precise, low flow deionized (DI) water vapor for high purity applica-
tions such as microelectronics manufacturing. Utilizing a heated, all-welded
titanium vapor tank with automated level-sensing and filling, the VDM300
produces vapor flow in a non-superheated vapor stage to reduce the ag-
gressive effects of DI water. Vapor flow is controlled by an integrated Brooks
Instrument high temperature thermal mass flow controller. The mass flow
sensor is a high stability flow sensor compatible with the elevated internal
temperatures found in the VDM300.
The result is a highly accurate, robust and responsive vapor delivery module
for challenging conditions.
• High temperature capability ensures reliable delivery of condensable gases
and precursors
• Digital measurement and control enhances accuracy (±1% of setpoint
>10% FS) and repeatability (±0.2% F.S.)
• Ultra-high purity vapor flow path ensures integrity and purity of the gas/va-
por
• Ultra-stable flow sensor reduces maintenance resulting in superior uptime
and lower cost of ownership (COO)
• All metal diaphragm-free control valve design optimizes reliability
Ultra High Purity Flow Path
• The mass flow controllers are constructed with a 10µ in Ra max surface
finish.
• Overall reduced surface area and un-swept volumes for faster dry-down
during purge steps
• Long-term sensor and device stability for maximum yield and throughput
Ultra High Purity Process Connections
VDM300 supports all metal seal/UHP industry gas connection interface stan-
dards for full OEM and process coverage.
• DI Water Inlet: ¼" VCR Male or ¼" tube compression fitting
• DI Water Vapor Outlet: 3/8-½" VCR Male fitting
• Tank Drain: 1/8" Instant Tube fitting
Analog & Digital Interfaces
The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc)
digital controls and alarms or optionally up to 24 Vdc when using an external
power supply, a USB diagnostic port, and EtherCAT communications. Analog
and digital controls are transmitted via the 15-pin D-subminiature connec-
tor. Reference Table 2-1 for pin assignments. USB digital communication is
transmitted via the micro-USB diagnostics port. Optional EtherCAT digital
communication is transmitted via the dual RJ-45 connectors. Reference
Supplemental Manual for Brooks Instrument EtherCAT for VDM300 Series
(X-DPT-VDM300-EtherCAT) for EtherCAT assignments and Supplemental
Manual for Brooks Instrument Brooks Expert Support Tool (X-SW-BEST-eng)
for diagnostic port communication.
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