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Brooks
VDM300 Vapor Delivery Module
®
2-5-1 Inlet Connections
2-5-2 Outlet Connections
Dl Water & Nitrogen lnlet: The VDM300 can be ordered with a 1/4" VCR
male fitting or a 1/4" tube compression fitting. This inlet is where the Dl water
source is connected for normal operation, or where the nitrogen source is
connected when draining the VDM300. It is up to the user to make sure that
the proper source is available for the particular mode of operation desired.
NOTE: The inlet pressure for both fluid sources must be between 10-40 psig
for proper operation.
Tank Drain: The VDM300 has a 1/8" lnstant Tube Fitting. This is the port
where the water will drain out of the tank of the VDM300.Make sure that
the 1/8" drain tube is properly connected to this port when draining the tank
The tubing should bottom out in the fitting. Leave this drain line permanently
connected as repeated coupling and uncoupling can cause unnecessarily
damage the tubing.
Vapor Outlet: The VDM300 has a 1/2" VCR male fitting for this connection.
The VDM300 is designed to deliver vapor into a vacuum so be sure that the
connection to the tool will remain at or below 200 Torr during normal
operation.
Because the internal MFC control valve is not a complete shutoff valve, it
is highly recommended that a shutoff valve be installed downstream of the
VDM300 to isolate it during device zeroing.
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
2-4
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