Manuels Connexes pour Brooks Instrument VDM300
Sommaire des Matières pour Brooks Instrument VDM300
- Page 1 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October , 2018 Brooks VDM300 ® DI Water Vapor Delivery Module VDM300 Vapor Delivery Module...
- Page 2 Read before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. These products must be properly installed, operated and maintained to ensure they continue to operate within their normal specifications. The following instructions must be adhered to and integrated into your safety program when installing, operating and maintaining Brooks Instrument products.
- Page 3 We appreciate this opportunity to service your vaporizer and flow control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications. Brooks provides an array of vaporizer, flow and pressure measurement and control products for various industries from biopharmaceuticals, oil and gas, fuel cell research and chemicals, to medical devices, analytical instrumentation, semiconductor manufacturing, and more.
- Page 4 Products larger than 25mm or 1" (inch) are in compliance with PED category I, II or III. European Electromagnetic Compatibility (EMC) The Brooks Instrument (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 2014/30/EU).
- Page 5 Glossary of Terms and Acronyms ....................1-2 Description ..........................1-3 Specifications for VDM300 Devices .................... 1-4 Overview of VDM300 Device Enclosure ..................1-5 1-10 Internal Layout of VDM300 and Basic Function ................1-9 1-11 Dimensions of VDM300 Device Enclosure................. 1-10 Section 2 Installation General............................2-1 Receipt of Equipment ........................
- Page 6 VDM300 Analog Connector Pin-Out.................... 2-6 Signals Required for Switching Modes on the VDM300.............. 3-1 General Troubleshooting Information and Courses of Action ............4-3 List of Possible Alarm Codes Detected by the VDM300 ............. 4-4 VDM Product Description Code ....................5-1...
- Page 7 ® October, 2018 1-1 Introduction The VDM300 is a self-contained, ultra-high purity vapor delivery module providing precise, low flow deionized (DI) water vapor for high purity applica- tions such as microelectronics manufacturing. Utilizing a heated, all-welded titanium vapor tank with automated level-sensing and filling, the VDM300 produces vapor flow in a non-superheated vapor stage to reduce the ag- gressive effects of DI water.
- Page 8 ® October, 2018 1-3 Product Support References Refer to www.BrooksInstrument.com for Brooks sales and service locations and to obtain other documents that support the VDM300 Series. Those documents include: • Brooks VDM300 data sheet (DS-VAP-VDM300-eng) • Supplemental Manual for Brooks Instrument EtherCAT for VDM300 ®...
- Page 9 • Tank Drain: 1/8" Instant Tube fitting Analog & Digital Interfaces The VDM300 supports analog input/output of 0-5 volt dc, TTL (0-5 Vdc) digital controls and alarms or optionally up to 24 Vdc when using an external power supply, a USB diagnostic port, and EtherCAT communications. Analog and digital controls are transmitted via the 15-pin D-subminiature connec- tor.
- Page 10 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 1-8 Specifications for VDM300 Devices (See Table 1-2) Table 1-2 Specifications for Standard VDM300 Description Performance Speci cations 3000 sccm Full Scale Ranges (H 20:1...
- Page 11 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 1-9 Overview of VDM300 Device Enclosure Figure 1-2 Front View of the VDM300...
- Page 12 Figure 1-3 Front View Details of the VDM300 LED Indicators Figure 1-3 (above) shows a detailed view of the switches and indicators located on the front of the VDM300. The following is a description of each switch and indicator. ZERO: This is a momentary detent switch that activates a zeroing function to remove any zero offset that may have accumulated over time during normal VDM300 operation.
- Page 13 October, 2018 Figure 1-4 Bottom View of the VDM Figure 1-4 is a diagram of the bottom view of the VDM300. The following is a description of the various connections and features: A. lnput/Output: This connection is a 15-Pin D-subminiature (DB-15) plug (male).
- Page 14 VDM300. Ensure that either fluid is pressurized to 10 - 40 psig. See Section 2-5-1 Inlet Connections for more details and instructions on how to connect Dl water and/or N2 to the inlet.
- Page 15 Figure 1-5 below illustrates the internal layout of the VDM300 system. The VDM300 has a titanium tank inside that serves as a reservoir for Dl water and a Mass Flow Controller (MFC).The Dl water is heated to the vapor state in the tank through the use of heaters attached to the tank and a heater control system along with the vacuum outlet pressure.
- Page 16 The following items can be purchased separately; these items are not neces- sary for the installation and are not used for normal operation of the VDM300 but can be utilized for troubleshooting: The Brooks Expert Support Tool (BEST) provides diagnostic tools and an alternate access to VDM300 functions.
- Page 17 • Relative humidity 45% nominal, 60% maximum, 25% minimum. 2-4 VDM300 Mounting and Orientation Figure 2-1 shows the proper mounting orientation for the VDM300.The VDM300 should be mounted using four 5/16" (7.9mm) screws tightening them to the screw manufacturer’s recommended specifications.
- Page 18 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Figure 2-1 VDM300 Installation Orientation...
- Page 19 1/4" tube compression fitting. This inlet is where the Dl water source is connected for normal operation, or where the nitrogen source is connected when draining the VDM300. It is up to the user to make sure that the proper source is available for the particular mode of operation desired.
- Page 20 VDM300. Read through the following connection descriptions and make certain that the interfacing connections from the user side meet the required specifications before any actual connections are made to the VDM300. De- tailed instructions on how to make the electrical connections will follow.
- Page 21 VDM300. It is also where DC power (±15 Vdc) for the internal electronics and the DC powered MFC heaters is needed. The connector on the VDM300 is a 15-pin D-subminiature (DB-15) plug (male).
- Page 22 VDM300. lt is recommended that this connection be secured to the jack screws on either side of the DB-15 plug on the VDM300. Note that if the DC power supplied by the user is on, the VDM300 electronics will power up at this point.
- Page 23 October, 2018 2-7 Diagnostic Port Connection The VDM300 can also be operated in a Service Mode through the micro USB diagnostic port connection utilizing Brooks Expert Support Tool (BEST) and a USB to micro USB cable. You should not use this port for normal operation.
- Page 24 Safety Interlocks The VDM300 uses 208-230 VAC to power the tank heaters. The tank heat- ers have a primary protection of two fuses located in the fuse drawer of the power entry module.
- Page 25 Unknown State (Interrupts previous mode) The ldle Mode is just that; the VDM300 is idle. lt is expected that AC and DC power to the VDM300 is on; therefore the internal electronics are active. However, the tank and MFC heaters are off, the fill and drain water valves are closed, and the VDM300 will not deliver water vapor on demand.
- Page 26 5 and 55 minutes to complete the Start-up sub-mode. The Start-up sub-mode functions as follows: 1. Pin 3 of the DB-15 is grounded by the user: This signals the VDM300 to begin normal operation in the Normal mode. This pin must remain grounded to keep the VDM300 in Normal mode.
- Page 27 The red “DEVICE FAULT” LED should be off. lf the “DEVICE FAULT” LED is on, then proceed to Section 4 Maintenance & Troubleshooting. At this time the VDM300 is ready to receive set points from the tool and begin delivering water vapor. The set point signal is received from the tool on Pin 8 of the DB-15.
- Page 28 3. Connect a 1/8" drain tube to the Tank Drain connector. The lnstant Tube fitting is compatible with 1/8" O.D. tubing. A piece of Teflon tubing is supplied with the VDM300 to aid in routing the water to be drained to a suitable collection vessel.
- Page 29 This is dependent on the nitrogen supply pressure and the amount of water in the tank when the Drain Mode is initiated. 3-4 Operation of BEST for VDM300 All of the operations in Section 3 can be performed over the diagnostic port using the BEST GUI.
- Page 30 ® October, 2018 4 Maintenance and Troubleshooting 4-1 Introduction VDM300 maintenance is discussed below in three areas: Routine Mainte- nance, Troubleshooting and MFC Removal/Packing/Shipping. 4-2 Routine Maintenance Any precision unit such as a vapor delivery module requires occasional servicing, especially if it has been operating for an extended period of time.
- Page 31 October, 2018 4-3 Troubleshooting the VDM300 The VDM300 is not intended to be serviceable by the customer. ln some instances, however, Brooks Field Service personnel or customers trained on the operation of the VDM can do basic diagnostic investigation and repair.
- Page 32 1. Verify all installation steps have been performed as outlined in previous sections of this manual. 2. Verify that the AC fuse and all electrical connections to the VDM300 meet the specifications explained in previous sections of this manual. 3. Make sure all fittings and connections to the VDM300 are secure.
- Page 33 ® October, 2018 4-5 Using BEST as a Diagnostic Tool Detailed Instructions on monitoring warnings and alarms for the VDM300 can be found in the installation and operations manual, titled “Brooks Expert Support Tool (BEST) Software for Brooks Devices” (X-SW-BEST-eng).
- Page 34 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued) 3. Faulty level sensor. 3. Contact Brooks for technical support.
- Page 35 Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued) 2. Input voltage is incorrect. 5. The thermal cuto on the heater circuit is open due to over temperature condition.
- Page 36 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued) Drain Circuit Error Fill Circuit Error alarm up to 55 min-...
- Page 37 ® October, 2018 Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued) The following table provides a list of the possible alarms for a set of defined Pinout Option/ CSR combinations and output pin signals. Utilize the Brooks’ BEST GUI to determine the signals on output pins 4, 10 & 13.
- Page 38 Failure to provide this information will delay processing by Brooks personnel. Copies of these forms can be down- loaded from the Brooks website (www.BrooksInstrument.com) or are avail- able from any of the Brooks Instrument locations provided on p. 2-1, www. brooksinstrument.com/globalsupportcenters...
- Page 39 ® October, 2018 5 VDM300 Product Description Code The following Product Description Code (PDC) indentifies the VDM300 and its optional features. This code is used to order the product. Call your Brooks sales representative if you need assistance. Table 5-1 VDM Product Description Code...
- Page 40 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Bulgarian Brooks Instrument Brooks Instrument. Brooks Instrument : (1) . (2) Brooks Instrument (PED) 0,5 bar (g) 25 mm 1" (inch), (PED). „ ”...
- Page 41 P ed instalací si p e t te následující instrukce! Spole nost Brooks Instrument konstruuje, vyrábí a testuje tento produkt tak, aby splnil mnoho národních a mezinárodních standard . P ístroje musí být ádn nainstalovány, používány a udržovány tak, aby byl zajišt n jejich nep etržitý provoz v rámci normálních technických specifikací. Musíte dodržovat následující...
- Page 42 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Dansk Grundlæggende vejledninger Læs disse før anvendelse! Brooks Instruments designer, fremstiller og afprøver sine produkter således, at de tilpasser sig både de indenrigs og internationale standarder. Disse udstyr bør installeres, bruges og repareres omhyggeligt, så...
- Page 43 Lees ze voordat u verder gaat! Brooks Instrument ontwerpt, produceert en test haar producten zodanig dat ze voldoen aan vele nationale en internationale normen. Deze producten moeten correct worden geïnstalleerd, bediend en onderhouden zodat ze binnen hun normale specificaties blijven werken.
- Page 44 Olulised juhised Enne kasutamist lugege hoolikalt läbi! Brooks Instrument konstrueerib, valmistab ja katsetab oma tooteid selliselt, et need vastaksid paljudele riiklikele ja rahvusvahelistele standarditele. Ainult nõuetekohane paigaldamine, kasutamine ja hooldamine tagab toodete katkematu talitluse tavaspetsifikatsiooni raames. Brooks Instrumenti toodete paigaldamisel, kasutamisel ja hooldamisel tuleb täita alljärgnevaid juhiseid ja integreerida need asjakohasesse ohutusprogrammi.
- Page 45 Perusohjeet Lue ensin ohjeet huolellisesti! Brooks Instrument suunnittelee, valmistaa ja testaa laitteensa vastaamaan useimpien kotimaisten ja kansainvälisten standardien vaatimuksia. Tuotteet tulee asentaa, käyttää ja huoltaa käyttöohjeiden mukaan jotta niiden toimivuus taataan. Brooks Instrumentin laitteide n asennuksessa, käytössä ja huollossa on noudatettava soveltuvia määräyksiä ja ohjeita, lisäksi mainitut ohjeet on huomioitava työsuojelun ohjeistuksessa.
- Page 46 AVERTISSEMENT: n’utilisez pas cet instrument au-delà des spécifications énumérées dans le manuel d’utilisation. Le non-respect de cet avertissement peut entraîner de graves blessures et / ou endommager l’équipement. • Si vous ne comprenez pas l’une des instructions, prenez contact avec un représentant de Brooks Instrument pour obtenir des explications. •...
- Page 47 Wichtige Anweisungen Bitte zuerst lesen! Brooks Instrument entwickelt, produziert und testet seine Produkte derart, dass sie viele nationale und internationale Standar ds erfüllen. Nur bei korrektem Einbau sowie richtiger Bedienung und Wartung dieser Produkte ist ein Betrieb unter Einhaltung der Standardvorgaben sichergestellt.
- Page 48 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Greek Brooks Instrument Brooks Instrument. ’ Brooks Instrument. : (1) . (2) Brooks Instrument. (PED) 0,5 bar (g) 25 mm (PED). PED. 2014/34/EU. Brooks Instrument 25 mm PED.
- Page 49 üzemeltetni és karbantartani ahhoz, hogy mindenképpen a normál m ködési tartományuknak megfelel en üzemelhessenek. Az alábbi utasításokat be kell tartani, és be kell építeni a munkavédelmi programba a Brooks Instrument termékeinek telepítése, üzemeltetése és karbantartása során.
- Page 50 Direttiva europea relativa alla compatibilità elettromagnetica (EMC) Le apparecchiature (elettriche/elettroniche) Brooks Instrument dispongono del marchio CE ed hanno superato positivamente i test per i requisiti di compatibilità elettromagnetica (Direttiva EMC 2014/30/EU). In ogni caso bisogna prestare particolare attenzione alla scelta dei cavi di segnale utilizzati per le apparecchiature con marchio CE.
- Page 51 Lai nodrošin tu šo izstr d jumu turpm ku darb bu atbilstoši noteiktajiem parametriem, tie ir pareizi j uzst da, j lieto un j apkopj. Uzst dot, lietojot „Brooks Instrument” izstr d jumus un veicot to apkopi, ir j iev ro šie nor d jumi un j iek auj tie j su droš bas programm .
- Page 52 SP JIMAS: nenaudokite šio prietaiso viršydami instrukcijoje ir eksploatacijos vadove nurodytus techninius duomenis. Nesilaikydami šio sp jimo galite sunkiai susižeisti ir (arba) sugadinti rang . Jei nesuprantate koki nors nurodym , kreipkit s „Brooks Instrument“ atstov , kad paaiškint . Paisykite vis sp jim , persp jim ir nurodym , pažym t ant gaminio arba pateikt su juo.
- Page 53 Produkty o wielko ci 25 mm lub 1 cala lub mniejsze podlegaj zaleceniom „Uznanej Praktyki In ynierskiej” (SEP). Europejska dyrektywa dotycz ca kompatybilno ci elektromagnetycznej (EMC) Urz dzenia elektryczne / elektroniczne firmy Brooks Instrument posiadaj ce oznaczenie CE, przesz y pozytywnie testy pod k tem spe niania przez nich wymogów kompatybilno ci elektromagnetycznej (Dyrektywa EMC 2014/30/EU).
- Page 54 Ler antes de proceder! A Brooks Instrument projecta, fabrica e testa os seus produtos de forma a satisfazer numerosas normas nacionais e internacionais. Estes equipamentos devem ser instalados, utilizados e mantidos de forma adequada, e devem funcionar dentro da sua gama de utilização. As instruções seguintes devem ser, durante a instalação, uso e/ou manutenção dos equipamentos da Brooks Instrument, apreendidas e integradas no plano de...
- Page 55 Installation and Operation Manual X-VAP-VDM300-eng Part Number: 541B210AAG Brooks VDM300 Vapor Delivery Module ® October, 2018 Romanian...
- Page 56 Pre íta pred inštaláciou! Brooks Instrument svoje výrobky projektuje, vyrába a testuje takým spôsobom, aby tieto vyhoveli domácim aj medzinárodným normám. Tieto zariadenia je potrebné predpísaným spôsobom inštalova , prevádzkova a udržiava , na zabezpe enie ich spo ahlivej a normálnej prevádzky v celom pracovnom rozsahu.
- Page 57 Pred servisom morate odstraniti tlak v obdelovalni liniji. e potrebujete rezervne dele, zagotovite, da usposobljeno osebje uporablja rezervne dele, ki jih je odobrila družba Brooks Instrument. Neodobreni deli in postopki lahko vplivajo na u inkovitost delovanja izdelka ali ogrozijo varno upravljanje postopka.
- Page 58 ¡Léalos primero! El Brooks Instrument proyecta, fabrica y prueba sus productos de manera que éstos respondan a numerosas normas nacionales e internacionales. Dichas instalaciones deben ser emplazadas, operadas y mantenidas adecuadamente, para que puedan marchar de todas formas en conformidad con el alcance normal de funcionamiento.
- Page 59 Läs detta innan du fortsätter! Brooks Instrument konstruerar, tillverkar och testar sina produkter med syfte att uppfylla alla nationella och internationella standarder. Dessa produkter måste installeras på rätt sätt, handhas och underhållas för att de skall fungera kontinuerligt enligt deras normala specifikation. De följande anvisningarna bör följas och integreras till Ert säkerhetsprogram varje gång när Brooks Instruments produkter installeras, handhas och underhålls.
- Page 60 In many cases this service can be provided under in-situ conditions, and the results will be traceable to the relevant international quality standards. SEMINARS AND TRAINING Brooks Instrument can provide seminars and dedicated training to engineers, end users and maintenance persons. Please contact your nearest sales representative for more details. TRADEMARKS Brooks, Quantim, are trademarks of Brooks Instrument, LLC.