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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
1-8
Brooks
allows the user to send commands and set points and receive flow and alarm
signals from the VDM300 utilizing an EtherCAT network. See Figure 1-4.
D. Power Entry Module: The power entry module is used to connect AC
power to the VDM300 tank heaters. See Section 1-13 VDM300 lnternal Lay-
out and Basic Function for more details about the tank heaters. The VDM300
is configured to accept 208-230 VAC power, provided by the end user, via a
shielded AC power cord with an IEC C-13 connector.
The power entry module consists of 3 main features as follows:
a. The AC input plug is a standard IEC C-14 connector where AC power can
be connected to the VDM300.
b. The ON/OFF switch for switching AC power to the VDM300 tank
heaters on or off. Please note that you cannot "power cycle" the device from
this switch; only the tank heaters.
c. The fuse drawer holds two 250V 3A fuses to protect the AC tank heaters.
E. Dl Water lnlet: This is where the Dl water supply is to be connected by
the end user. The fitting is either a 1/4" VCR Male fitting or a 1/4"
compression tube fitting depending on the configuration ordered. Ensure the
DI water source is equal to or better than UHP (≥ 18 mega ohm-cm). This is
also where a nitrogen gas supply is to be connected for the purpose of
draining the VDM300. Ensure that either fluid is pressurized to 10 - 40 psig.
See Section 2-5-1 Inlet Connections for more details and instructions on how
to connect Dl water and/or N2 to the inlet.
F. Tank Drain: This is a 1/8" lnstant Tube Fitting. This is the outlet through
which the Dl water is drained from the tank. See Section 1-10 VDM300 lnter-
nal Layout and Basic Function for more details about the tank.
VDM300 Vapor Delivery Module
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