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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
4 Maintenance and Troubleshooting
4-1 Introduction
4-2 Routine Maintenance
4-1
Brooks
VDM300 maintenance is discussed below in three areas: Routine Mainte-
nance, Troubleshooting and MFC Removal/Packing/Shipping.
Any precision unit such as a vapor delivery module requires occasional
servicing, especially if it has been operating for an extended period of time.
It is recommended that you send the device to a Brooks Service Center for
cleaning and recalibration at 12 month intervals.
Please follow the instructions for removal, product packaging and product
return instructions found in Sections 4-6 thru 4-8.
All active process instrumentation and equipment is subject to aging and
wear from their environment. This includes temperature, mechanical stress,
component tolerance shift, contaminant buildup, oxidation, and other influ-
ences. The effects are gradual, but over time the changes can affect the
accuracy of even the best equipment. Therefore, it is recommended to drain
and refill the DIW tank every 3 months to prevent non-volatile contaminant
build-up in the DIW tank and to re-zero the device at 6 month intervals as a
minimum. Refer to Section 3-3 for draining instructions. Refer to Section 3-2-
3 for re-zeroing instructions.
VDM300 Vapor Delivery Module
®
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