Brooks Instrument VDM300 Manuel D'installation Et D'utilisation page 11

Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
Brooks VDM300 Vapor Delivery Module
®
October, 2018
1-9 Overview of VDM300 Device Enclosure
Figure 1-2 Front View of the VDM300
1-5