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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
4-4 General Troubleshooting Guide
4-3
Brooks
Refer to Table 4-1 for general troubleshooting information.
Some general troubleshooting steps to follow are
Table 4-1 General Troubleshooting Information and Courses of Action
1. Verify all installation steps have been performed as outlined in previous
sections of this manual.
2. Verify that the AC fuse and all electrical connections to the VDM300 meet
the specifications explained in previous sections of this manual.
3. Make sure all fittings and connections to the VDM300 are secure.
4. Verify that all operating conditions of the system in which the VDM300 is
installed have been met for proper operation
a. proper fluid for current desired mode of operation
b. fluid supply pressure and flow
c. outlet pressure
lf these steps do not correct the problem, contact Brooks technical support
for further assistance.
VDM300 Vapor Delivery Module
®
Evaluate tank using start-up procedure
in section 3-2-1 or utilize BEST GUI to
manually purge MFC control valve.
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