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Brooks
VDM300 Vapor Delivery Module
®
Table 2-1 VDM300 Analog Connector Pin-Out
15-Pin
Connector
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Input/Output Connection: The Input/Output connection needs to be
connected to the tool interface. It is this connection that allows the user to
send commands and setpoints and receive flow and alarm signals from the
VDM300. It is also where DC power (±15 Vdc) for the internal electronics and
the DC powered MFC heaters is needed. The connector on the VDM300 is a
15-pin D-subminiature (DB-15) plug (male). The user must provide a 15-wire
interface cable with a 15-pin D-subminiature (DB-15) receptacle (female)
on the VDM300 end. To ensure full EMC protection, install the ferrite core,
included with the device, on the cable at a point closest to the VDM300.
Table 2-1 shows the pin configuration for the Input/Output DB-15 connector.
Direction
Schematic
Signal Name
0-24Vdc
Input
Optional
Flow Signal Out
Output
Normal
Input
Operation
Error
Output
Signal A
I/O Common
Input/ Output
-15 VDC
Input
+15 VDC
Input
Set Point
Input
Auxiliary
Input
Error
Output
Signal B
Analog Ground
Input/output
Analog Ground
Input/output
VDM 300
Output
Status
Indicator
System Drain
Input
Chassis Ground
Input
Installation and Operation Manual
Signal
Description
State
Logic levels default to
Sets logic levels for digital output on
5VDC for any input <5 VDC.
Pins 4, 10 & 13.
Scaled to vapor mass flow rate
0 to 5VDC
Ground- Active
Grounding this signal will prepare the
Floating-Inactive
system for vapor delivery. It should
remain grounded during the delivery
process.
This signal is Brooks programmable.
+5 to 24VDC or
Ground
Digital Ground Reference
N/A
Negative rail for power supply
-15 VDC
circuitry
+15 VDC
Positive rail for power supply
circuitry
0 to 5 VDC
Analog input scaled to desired vapor
mass flow rate
N/A
Function Unassigned
This signal is Brooks programmable.
+5 to 24VDC or
Ground
N/A
Ground reference for analog circuitry
N/A
Ground reference for analog circuitry
+5 to 24VDC or
5-24 VDC indicates System is not
Ground
ready,
Ground indicates System ready- to-
use.
Oscillation between Ground and High
at 1Hz indicates Drain Mode
Ground - Active
Grounding this signal will initiate a
Floating - Inactive
System Drain when Pin 3 is inactive.
N/A
Reference ground for chassis
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
2-6
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