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Brooks Instrument VDM300 Manuel D'installation Et D'utilisation page 25

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Brooks
VDM300 Vapor Delivery Module
®
3 Operation
3-1 Idle Mode
3-2 Normal Mode
The VDM300 has three main modes of operation: Idle, Normal, and Drain.
ln each mode the VDM300 functions are in different conditions. Also, in the
Normal mode, there is a sub-mode referred to as Warm-up or Start-up.
Table 3-1 shows the required states of Pins 3 and 14 of the Input/Output DB-
15 to achieve the desired mode of operation. ln the following sections, each
mode and how to achieve each mode will be discussed.
Table 3-1 Signals Required for Switching Modes on the VDM300
Input
Pin 3
Floating
Grounded
Floating
Grounded
The ldle Mode is just that; the VDM300 is idle. lt is expected that AC and
DC power to the VDM300 is on; therefore the internal electronics are active.
However, the tank and MFC heaters are off, the fill and drain water valves
are closed, and the VDM300 will not deliver water vapor on demand.
The amber "WARM UP" LED will be flashing and the other two LEDs, "DE-
VICE FAULT' and "DEVICE READY", will be off.
The VDM300 will communicate with the GUl while in the ldle Mode.The ldle
Mode is achieved when Pins 3 and 14 of the DB-15 are left in a floating state
(see Table 3-1). It is recommended that the VDM300 be put into ldle Mode
during extended periods of downtime.
The VDM300 Normal Mode is the primary mode of operation. lt is in this
mode that the VDM300 will deliver water vapor on demand. There is, how-
ever, a sub-mode that occurs before the VDM300 reaches a Ready-to-Use
(RTU) state in Normal Mode, and that sub-mode is referred to as Warm-up
or Start-up. When it is desired that the VDM300 deliver water vapor, the
VDM300 has to be prepared to do so. The Start-up sub-mode is what the
VDM300 automatically goes into when the signal for normal operation is
given by the user. Once it has reached the Ready-to-Use state, it is recom-
mended that the VDM300 flow sensor be zeroed. The following sections will
explain in greater detail the operation of the VDM300 in Normal Mode and
the recommended process for zeroing the VDM300 flow sensor.
Installation and Operation Manual
Part Number: 541B210AAG
Input
Pin 14
Floating
Floating
Grounded
Grounded
Unknown State
(Interrupts previous mode)
X-VAP-VDM300-eng
October, 2018
Mode
Idle
Normal
Drain
3-1

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