Publicité
Brooks
VDM300 Vapor Delivery Module
®
Paragraph
Number
Section 1 Introduction
1-1
Introduction.................................................................................................................................. 1-1
1-2
How To Use This Manual ............................................................................................................ 1-1
1-3
Product Support References ....................................................................................................... 1-2
1-4
Warning, Caution and Notice Statements ................................................................................... 1-2
1-5
Product Warranty ........................................................................................................................ 1-2
1-6
Glossary of Terms and Acronyms ................................................................................................ 1-2
1-7
Description .................................................................................................................................. 1-3
1-8
Specifications for VDM300 Devices ............................................................................................ 1-4
1-9
Overview of VDM300 Device Enclosure ..................................................................................... 1-5
1-10
Internal Layout of VDM300 and Basic Function .......................................................................... 1-9
1-11
Dimensions of VDM300 Device Enclosure................................................................................. 1-10
Section 2 Installation
2-1
General........................................................................................................................................ 2-1
2-2
Receipt of Equipment .................................................................................................................. 2-1
2-3
Recommended Storage Practice ................................................................................................ 2-2
2-4
VDM300 Mounting and Orientation ............................................................................................. 2-2
2-5
Mechanical Connections ............................................................................................................. 2-2
2-5-1 Inlet Connections......................................................................................................................... 2-3
2-5-2 Outlet Connections ...................................................................................................................... 2-4
2-6
Electrical Connections ................................................................................................................. 2-4
2-7
Diagnostic Port Connection ......................................................................................................... 2-8
2-8
Return Shipment ......................................................................................................................... 2-8
2-9
Transit Precautions ..................................................................................................................... 2-8
2-10
Removal From Storage ............................................................................................................... 2-8
2-11
Product Safety Information .......................................................................................................... 2-9
Section 3 Startup
3
Operation..................................................................................................................................... 3-1
3-1
Idle Mode..................................................................................................................................... 3-1
3-2
Normal Mode ............................................................................................................................... 3-1
3-2-1 Start-up (Normal Mode) ............................................................................................................... 3-2
3-2-2 Ready-to-Use (Normal Mode) ..................................................................................................... 3-3
3-2-3 Zeroing the VDM300 ................................................................................................................... 3-3
3-2-3-1Procedure for Manually Zeroing the VDM300 ............................................................................. 3-4
3-3
Drain Mode .................................................................................................................................. 3-4
3-4
Operation of BEST for VDM300 .................................................................................................. 3-5
Section 4 Maintenance and Troubleshooting
4
Maintenance and Troubleshooting .............................................................................................. 4-1
4-1
Introduction.................................................................................................................................. 4-1
4-2
Routine Maintenance .................................................................................................................. 4-1
4-3
Troubleshooting the VDM ............................................................................................................ 4-2
4-4
General Troubleshooting Guide .................................................................................................. 4-3
4-5
Using BEST as a Diagnostic Tool ................................................................................................ 4-4
4-6
VDM300 Removal ....................................................................................................................... 4-9
4-7
VDM300 Packaging..................................................................................................................... 4-9
4-8
VDM300 Shipping ....................................................................................................................... 4-9
i
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Number
Page
Publicité
