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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
Brooks
VDM300 Vapor Delivery Module
®
October, 2018
4-5 Using BEST as a Diagnostic Tool
Detailed Instructions on monitoring warnings and alarms for the VDM300 can
be found in the installation and operations manual, titled "Brooks Expert
Support Tool (BEST) Software for Brooks Devices" (X-SW-BEST-eng).
Reference Chapter 8, Monitoring.
The following table provides a description of the alarm codes along with po-
tential causes and corrective actions.
Table 4-2 List of Possible Alarm Codes Detected by the VDM300
4-4
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