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Brooks Instrument VDM300 Manuel D'installation Et D'utilisation page 28

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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
3-2-3-1 Procedure for Manually Zeroing the VDM300
3-3 Drain Mode
3-4
Brooks
As mentioned earlier, the VDM300 can be zeroed in one of two ways, either
pressing the ZERO switch or issuing a command from the BEST. The
manual procedure for zeroing the VDM300 with the switch or with the BEST
is as follows:
1. The VDM300 must be in Normal mode and in its Ready-to-Use
condition (green "DEVICE READY" LED on and amber "WARM UP"
LED blinking). Pin 13 of the DB-15 will be pulled to ground.
2. The VDM300 must not have any fault conditions. The red "DEVICE
FAULT" LED must be off and Pins 4 and 10 on the DB-15 must be in
their nactive states.
3. There should have been no set point given to the VDM300 for at
least 2 minutes.
4. The downstream external shutoff valve should be closed.
5. lf the conditions in steps 1 through 4 have been met, then take one
of the following steps:
• Press and hold the "ZERO" momentary switch for 2 seconds
and release
• lssue the zero command from the BEST GUI.
Any non-zero output (flow sensor offset) from the VDM300 ("Flow
Signal Out", Pin 2, DB-15) should now be gone.
It is highly recommended that a zero is performed when the
VDM300 reaches Ready-to-Use condition after being put into
Normal mode after every power cycle.
The Drain Mode is for emptying the VDM300 water tank. lt is recommended
to drain the tank when there will be extended periods of downtime for the
VDM300.
To drain the VDM300, follow these instructions:
1. Provide a 0 sccm setpoint to the device.
2. Switch the source for the Dl water inlet from Dl Water to Nitrogen.
Make certain that the nitrogen supply is pressurized to between
10- 40 psig.
3. Connect a 1/8" drain tube to the Tank Drain connector. The lnstant
Tube fitting is compatible with 1/8" O.D. tubing. A piece of Teflon tubing
is supplied with the VDM300 to aid in routing the water to be drained to
a suitable collection vessel.
4. Make certain that the drain has been routed to a suitable collection
vessel. (600 ml volume)
VDM300 Vapor Delivery Module
®

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