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Brooks
VDM300 Vapor Delivery Module
®
1-1 Introduction
1-2 How To Use This Manual
The VDM300 is a self-contained, ultra-high purity vapor delivery module
providing precise, low flow deionized (DI) water vapor for high purity applica-
tions such as microelectronics manufacturing. Utilizing a heated, all-welded
titanium vapor tank with automated level-sensing and filling, the VDM300
produces vapor flow in a non-superheated vapor stage to reduce the ag-
gressive effects of DI water. Vapor flow is controlled by an integrated Brooks
Instrument high temperature thermal mass flow controller. The thermal mass
flow controller is a high stability flow sensor compatible with the elevated
internal temperatures found in the VDM300.
Figure 1-1 VDM Vapor Delivery Module
This manual is intended to provide the user with all the information necessary
to install, operate, troubleshoot and maintain this vaporizer. The manual is
organized in the following sections:
Section 1 Introduction
Section 2 Installation
Section 3 Operation
Section 4 Maintenance and Troubleshooting
Section 5 Product Description Code
Appendix A Essential Instructions
Warranty, Local Sales/Service Contact Information
It is recommended that this manual be read in its entirety before attempting
to operate or repair these devices.
Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
1-1
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