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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
1-8 Specifications for VDM300 Devices (See Table 1-2)
Table 1-2 Specifications for Standard VDM300
Performance Speci cations
Full Scale Ranges (H
Turndown Ratio
Step Response Time
Accuracy
Linearity
Repeatability
Temperature Coe cient
Valve Shutdown
Electrical
Communication
Connections
Input Signals
Output Signals
Power
Diagnostic Port
Mechanical
Fittings
Weight
Mounting Orientation
Environmental
Maximum Outlet Pressure
DI Water Supply Pressure
DI Water Quality
N
Purge Pressure
2 2 2 2 2
Ambient Temperature Range
Humidity
Certi cations
Electromagnetic Compatibility
Low Voltage
L
RoHS
REACH
SEMI E54.20-1108
1. All performance speci cations apply only in the ready state, ready light on.
Special conditions
for
safe use:
A. To ensure full EMC protection the ferrite core included with the device (Wurth Electronics Inc Part Number 74271131 ) must be installed to the control cable.
B. To ensure full EMC protection a shielded AC power cable and a shielded control cable (<30 m. length) must be supplied by the user.
1-4
1
O)
2
±1.0% of setpoint (> 10% full scale); ±0.2% of full scale (5-10% full scale setpoint)
Brooks
VDM300 Vapor Delivery Module
®
Description
3000 sccm
20:1
≤ 2 seconds (±2% of setpoint)
±0.5% of full scale
±0.2% of full scale
0.05% F.S. per °C (zero and span)
<0.5% F.S. (water vapor)
Analog or EtherCAT
15-pin D-Sub and dual RJ-45
Flow setpoint (0 to 5 Vdc)
Start up/drain
Flow output (0 to 5 Vdc)
Ready to use
DC: ±15 Vdc ±5% @ 1.2 amp
AC: 208-230 Vac, 50/60 Hz, 290 watts nominal
Micro USB
See Model Code for list
Dry: 15lbs Wet: 16lbs
Vertical (inlet down)
≤200 Torr
10 to 40 psig (20 psig recommended)
UHP: ≥18 mega ohm-cm
10 to 40 psig (20 psig recommended)
15°C to 45°C
0 to 95% RH, non-condensing
Fully compliant to Directive 2014/30/EU (EN: 61326-1:2013)
Fully compliant to Directive 2014/35/EC (EN: 61010-1:2010)
Fully compliant to Directive 2011/65/EU
Fully compliant to Directive EC 1907/2006
Standard for Sensor/Actuator Network Communication for EtherCAT
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