Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
Brooks
VDM300 Vapor Delivery Module
®
October, 2018
Table 4-2 List of Possible Alarm Codes Detected by the VDM300 (continued)
Drain Circuit Error
Fill Circuit Error
ct
alarm
up to 55 min-
4-7
