Brooks Instrument VDM300 Manuel D'installation Et D'utilisation page 39

Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
5 VDM300 Product Description Code
Table 5-1 VDM Product Description Code
Code Description Code Description Code Description Code Description Code Description
I. I. I. I. I.
Base Model Code
I. I. I. I. I. Fluid
III. III. III. III. III. Flow Range
IV. IV. IV. IV. IV. Supply Voltage
V. V. V. V. V. Fluid Inlet Fitting
VI. VI. VI. VI. VI. Vapor Outlet Fitting
VII. VII.
VII. VII. Mounting VII.
VIII. VIII. VIII. Pinout Options VIII. VIII.
IX. IX. IX. Customer Special Request
IX. IX.
Note: Devices will ship with latest rmware unless otherwise speci ed.
Sample Model Code Sample Model Code
Sample Model Code Sample Model Code Sample Model Code
I I I I I II II II II II III III III III III
VDM3 VDM3 VDM3 W W W W W 3000 3000 3000
VDM3 VDM3 3000 3000
The following Product Description Code (PDC) indentifies the VDM300 and
its optional features. This code is used to order the product. Call your Brooks
sales representative if you need assistance.
Code Code Code Code Code
VDM3 VDM3
VDM3 VDM3 VDM3
W W W W W
3000 3000 3000 3000 3000
A A A A A
1 1 1 1 1
2 2 2 2 2
A A A A A
1 1 1 1 1
L L L L L
N N N N N
XXXX XXXX XXXX
XXXX XXXX
IV IV IV IV IV V V V V V VI VI VI VI VI VII VII VII
VII VII
A A A A A 1 1 1 1 1 A A A A A 1 1 1 1 1
Brooks VDM300 Vapor Delivery Module
®
Code Description Code Description Code Description Code Description Code Description
Vapor Delivery Module
DI Water
3000 sccm
208-230 Vac, 50/60 Hz
1/4" VCR Male
1/4" Tube Compression
3/8-1/2" VCR Male
Standard Backplate
With Low Level Alarm
Without Low Level Alarm
CSR Number
VIII VIII VIII IX IX IX IX IX
VIII VIII
L L L L L XXXX XXXX XXXX
XXXX XXXX
5-1