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Brooks Instrument VDM300 Manuel D'installation Et D'utilisation page 6

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Installation and Operation Manual
X-VAP-VDM300-eng
Part Number: 541B210AAG
October, 2018
Paragraph
Number
Section 5 Product Description Code
5
VDM300 Product Description Code ............................................................................................ 5-1
Section A Essential Instructions .............................................................................................................. A-1
Warranty, Local Sales/Service Contact Information ........................................................................Back Cover
Figure
Number
1-1
VDM Vapor Delivery Module ...................................................................................................... 1-1
1-2
Front View of the VDM300 ......................................................................................................... 1-5
1-3
Front View Details of the VDM300 LED Indicators ..................................................................... 1-6
1-4
Bottom View of the VDM ............................................................................................................. 1-7
1-5
VDM300 Block Diagram ............................................................................................................. 1-9
2-1
VDM300 Installation Orientation.................................................................................................. 2-3
2-2
Diagram of Electrical Connections to the VDM300 .................................................................... 2-5
Table
Number
1-1
Terms and Acronyms ................................................................................................................... 1-2
1-2
Specifications for Standard VDM300 .......................................................................................... 1-4
2-1
VDM300 Analog Connector Pin-Out............................................................................................ 2-6
3-1
Signals Required for Switching Modes on the VDM300.............................................................. 3-1
4-1
General Troubleshooting Information and Courses of Action ...................................................... 4-3
4-2
List of Possible Alarm Codes Detected by the VDM300 ............................................................. 4-4
5-1
VDM Product Description Code .................................................................................................. 5-1
Brooks
VDM300 Vapor Delivery Module
®
Figures
Tables
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Number
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Number
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Number
ii

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