Table des Matières
Publicité
N.
Read/
Data
Description
Write
Type
167
R/W
A
Stop speed
reading
Activates /
deactivates
the pump
speed read-
ing after Stop
command
200
R
N
Pump current
in mA dc
201
R
N
Pump volt-
age in Vdc
216
R
N
Controller Air
Temperature
(°C).
224
R
A
Pressure
reading
Format = X.X
E XX
226
R
N
Rotation Fre-
quency (rpm)
300
R
N
Cycle time in
minutes (ze-
roed by the
reset com-
mand)
301
R
N
Cycle num-
ber (zeroed
by the reset
command)
302
R
N
Pump life in
hours (ze-
roed by the
reset com-
mand)
310
Reserved to Varian service
to
347
358
R/W
N
Tip-seal life
(R)
Tip-seal life
reset (W)
400
R
A
CRC
EPROM
(QE)
401
R
A
Boot CRC
(BL)
402
R
A
CRC Param.
(PA)
404
R
A
CRC Pa-
rameter
structure
406
R
A
Program List-
ing Code
407
R
A
Parameter
Listing Code
500
Reserved to Varian service
Admitted
N.
Values
0 = disable
503
1 = enable
(default = 0)
504
1. Automatic means that when the controller
0 to 70
2. On command means that the vent valve is
3. These commands remove the pump motor
0 to 999999
TOO HIGH LOAD
0 to 9999
0 to 999999
SERVICE OPTIONS
Varian pumping systems will provide many years
of trouble-free operation if the maintenance proce-
0 = reset
dures are observed.
Pumping System cleaning and internal scroll pump
tip seal replacement are recommended when
Pumping System TMP adsorbed current (with
QE8XXXX
blanked inlet flange) has risen to an unacceptably
(where "XXXX"
are variable)
high level (>500mA) or when the message "TIP-
SEAL SERV" appears on the TPS-compact front
BL2XXXX
(where "XXXX"
side display.
are variable)
The warning message appears after 5000h of op-
eration.
PA8XXXX
(where "XXXX"
If your TPS-compact exhibits humming or grinding
are variable)
noises from the scroll pump, a major overhaul
"XXXX"
should be done by Varian Vacuum Technologies.
Advance exchange TPS-compact are available to
minimize downtime.
"XXXXXXXXXX"
The parts needed for Tip-Seal replacement on the
internal scroll pump are available in the kit de-
scribed in Orderable parts Table. This kit contains
"XXXXXXXXXX"
seals and O-rings, and can be obtained from your
Varian dealer.
71/74
TECHNICAL INFORMATION
Read/
Data
Description
Write
Type
R/W
N
RS 485 ad-
dress
R/W
L
Serial type
select
NOTES
stops, the vent valve is opened with a delay
defined by window n. 126; when the controller
starts, the vent valve is immediately closed.
opened or closed by means of window n. 122.
supply for a short time. If they are used con-
tinuously, they can cause the pump stopping.
7
6
5
4
3
SHORT CIRCUIT
OVERVOLTAGE
Window N. 206 Bit Description
Admitted
Values
0 to 31
(default = 0)
0 = RS 232
1 = RS 485
(default = 0)
2
1
0
NO CONNECTION
PUMP OVERTEMP.
CONTROLL. OVERTEMP.
87-901-010-01
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Table des Matières
