Table des Matières
Publicité
GENERAL INFORMATION
This equipment is destined for use by professionals. The user
should read this instruction manual and any other additional
information supplied by Varian before operating the equipment.
Varian will not be held responsible for any events occurring due
to non-compliance, even partial, with these instructions,
improper
use
by
untrained
interference with the equipment or any action contrary to that
provided for by specific national standards.
The TPS-compact is an integrated system with a turbo-
molecular pump for high and ultra-high vacuum applications
associated with its relevant controller and its primary pump.
The system can pump any type of gas or gas compound. It is
not suitable for pumping liquids or solid particles. The pumping
action is obtained through a high speed turbine driven by a
high-performance 3-phase electric motor. The TPS-compact is
free of contaminating agents and, therefore, is suitable for
applications requiring a "clean" vacuum.
The TPS-compact is equipped with auxiliary connectors to
control the vent valve, to be controlled from a remote site by
means of an host computer connected through a serial line.
The following paragraphs contain all the information necessary
to guarantee the safety of the operator when using the
equipment. Detailed information is supplied in the appendix
"Technical Information".
This manual uses the following standard protocol:
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION
The caution messages are displayed before procedures which,
if not followed, could cause damage to the equipment.
NOTE
The notes contain important information taken from the text.
STORAGE
In order to guarantee the maximum level of performance and
reliability of Varian pumping systems, the following guidelines
must be followed:
•
when shipping, moving and storing pumps, the following
environmental specifications should not be exceeded:
•
temperature range: -20 °C to +70 °C
•
relative humidity range: 0 to 95% (non condensing)
•
the turbomolecular pumps must be always soft-started
when received and operated for the first time by the
customer
•
the shelf life of a turbomolecular pump is 10 months from
the shipping date.
CAUTION
If for any reason the shelf life time is exceeded, the pumping
system has to be returned to the factory. Please contact the
local Varian Vacuum Sales and Service representative for
informations.
PREPARATION FOR INSTALLATION
The TPS-compact is supplied in a special protective packing. If
this shows signs of damage which may have occurred during
transport, contact your local sales office.
When unpacking the system, be sure not to drop it and avoid
any kind of sudden impact or shock vibration to it.
Do not dispose of the packing materials in an unauthorized
manner. The material is 100% recyclable and complies with
EEC Directive 85/399.
persons,
non-authorized
WARNING!
In order to prevent outgassing problems, do not use bare hands
to handle components which will be exposed to vacuum.
Always use gloves or other appropriate protection.
Normal exposure to the environment cannot damage the TPS-
compact. Nevertheless, it is advisable to keep it closed until it is
installed in the system, thus preventing any form of pollution by
dust.
INSTALLATION
Do not remove the adhesive and protective cap before
connecting the turbopump to the system.
Do not install or use the pumping system in an environment
exposed to atmospheric agents (rain, snow, ice), dust,
aggressive gases, or in explosive environments or those with a
high fire risk. During operation, the following environmental
conditions must be respected:
−
maximum pressure: 2 bar above atmospheric pressure
−
temperature: from +5 °C to +35 °C
−
relative humidity: 0 - 95% (non-condensing)
In the presence of magnetic fields the pumping system must be
protected using a ferromagnetic shield.
The TPS-compact can be installed in any position. Fix the TPS-
compact in a stable position connecting the inlet flange of the
turbopump to a fixed counter-flange capable of withstanding a
torque of 50 Nm around its axis.
The turbopump with ISO inlet flange must be fixed to the
vacuum chamber by means of clamps or claws. The following
table shows, for each fixing device, the necessary number of
clamps or claws and the relevant fixing torque.
FLANGE
FIXING DEVICE
ISO 63
M10 clamps
ISO 100 K
M10 clamps
ISO 160 K
M10 clamps
54/74
INSTRUCTIONS FOR USE
CAUTION
NOTE
CAUTION
N.
FIXING TORQUE
4
22 Nm
4
22 Nm
4
22 Nm
87-901-010-01
Publicité
Table des Matières
