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The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Varian
hardware. See the appendix "Technical Information" for a
detailed description.
NOTE
The TPS-compact cannot be fixed by means of its base.
For installation of optional accessories, see "Technical
Information".
USE
This paragraph details the fundamental operating procedures.
Make all electrical an pneumatic connections before the use of
the system.
While heating the vacuum chamber, the temperature of the inlet
flange must not exceed 120 °C.
Never use the pumping system when the turboinlet flange is not
connected to the vacuum chamber or is not blanked.
Do not touch the turbopump or any of its accessories during the
heating process. The high temperatures may cause burns.
Avoid impacts or harsh movements of the pump when in
operation. The bearings may become damaged and damages
to the persons or the things could be taken place.
CAUTION
Use inert gas free from dust, particles or humidity (like
Nitrogen) for venting the pump. The pressure at the vent port
must be less than 2 bar (above atmospheric pressure).
When employing the pump for pumping toxic, flammable, or
radioactive gases, please follow the required procedures for
each gas disposal.
Do not use the pumping system in presence of explosive
gases.
Switching on and Use of TPS-compact
To switch on the TPS-compact it is sufficient to supply the
mains and then move the external switch to ON position. The
integrated controller automatically recognizes the mains
presence and start up the pump.
At the first start up it is recommended to use the "Soft Start"
mode by enabling it on the controller. For the following start ups
it is recommended to disable the "Soft Start" mode. For the
"Soft Start" mode activation procedure, see the paragraph
"Signal Description" in the chapter "Technical Information".
The blue LED "STATUS" located on the TPS-compact base
rear panel indicates with its flashing frequency the system
operating conditions:
•
with no flashing: the pump is normally rotating;
•
slowly flashing (period of about 400 ms): the system is in
ramp, or in braking, or in Stop, or in "Waiting for interlock"
status;
•
fast flashing (period of about 200 ms): error condition.
WARNING!
WARNING!
WARNING!
WARNING!
See the appendix "Technical Information" for a detailed
description of the TPS-compact control panel.
TPS-compact Switching off
To switch off the TPS-compact it is sufficient to move the
external switch to OFF position. The integrated controller
immediately stops the pumping system.
Emergency Stop
To immediately stop the TPS-compact in an emergency
condition it is necessary to remove the supply cable from the
mains plug or moving the external switch to OFF position.
MAINTENANCE
The TPS-compact does not require any maintenance (except
Tip-seal replacement). Any work performed on the system must
be carried out by authorized personnel.
Before carrying out any work on the system, disconnect it from
the mains, vent the pump by opening the appropriate valve,
wait until the rotor has stopped turning and wait until the
surface temperature of the pump falls below 50 °C.
In the case of breakdown, contact your local Varian service
center.
Before returning the system to the constructor for repairs, the
"Health and Safety" sheet attached to this instruction manual
must be filled-in and sent to the local sales office. A copy of the
sheet must be inserted in the system package before shipping.
If a system is to be scrapped, it must be disposed of in
accordance with the specific national standards.
Meaning of the "WEEE" logo found in labels
The following symbol is applied in accordance with the EC
WEEE (Waste Electrical and Electronic Equipment) Directive.
This symbol (valid only in countries of the European
Community) indicates that the product it applies to must NOT
be disposed of together with ordinary domestic or industrial
waste but must be sent to a differentiated waste collection
system.
The end user is therefore invited to contact the supplier of the
device, whether the Parent Company or a retailer, to initiate the
collection and disposal process after checking the contractual
terms and conditions of sale.
55/74
INSTRUCTIONS FOR USE
WARNING!
NOTE
DISPOSAL
87-901-010-01
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