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Technical Information
Technical Specification
Technical Specification
Tab. 2
Pumping speed
Compression ratio
Base pressure *
(with recommended forepump)
Inlet flange
Foreline flange
Rotational speed
Start-up time
Cooling requirements
Recommended forepump
Operating position
Coolant water
Operating ambient temperature
with natural air convection
Operating ambient temperature
with forced air cooling or water
Bakeout temperature
Vibration level (displacement)
Noise level
198/228
Technical Specification
Turbo-V 81-T User Manual / 87-900-984-01
With ISO 63
or CFF 4.5"
N
: 77 l/s
2
He: 65 l/s
H
: 50 l/s
2
N
: >7 x 10
2
He: 5 x 10
H2: 3 x 10
mechanical:
5 x 10
mbar (3.8 x 10
Torr)
-9
-9
diaphragm:
5 x 10
mbar (3.8 x 10
Torr)
-8
-8
ISO 63
KF 40 NW
CFF 4.5" O.D.
CFF 2.75" O.D.
KF16 NW
1350 Hz (max)
< 60 seconds
Natural air convection
Forced air or water optional
mechanical: Agilent DS 42 – DS 102
dry pump: Agilent SH 100
any
flow: 10 l/h (0.05 GPM)
temperature: + 15 °C to + 35 °C
pressure: 2 to 4 bar (30 to 60 Psi)
+5 °C to +25 °C
+5 °C to +35 °C
120 °C at inlet flange max. (CF flange)
80 °C at inlet flange max. (ISO flange)
< 0.01 μm at inlet flange
≤ 45 dB (A) at 1 meter
With KF 40 NW
or CFF 2.75"
N
: 50 l/s
2
He: 56 l/s
H
: 46 l/s
2
6
3
2
(E)
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