17
Technical Information
Technical Specification
Technical Specification
Pumping speed (with inlet screen)
Compression ratio
Base pressure
with recommended forepump
Inlet flange
Foreline flange
Rotational speed
Start-up time
Recommended forepump
Operating position
Operating ambient temperature
Bakeout temperature
Vibration level (displacement)
Lubricant
Cooling requirements
Noise level
Power supply:
242/276
N
:
2
He:
H
:
2
N
:
2
He:
H
:
2
Input voltage:
Input freq.:
TV 902 Navigator User Manual / 87-900-999-01 (B)
680 l/s
810 l/s
850 l/s
>1 x 10
8
1 x 10
5
1 x 10
4
< 1 x 10
mbar
-9
(< 1 x 10
Torr)
-9
(According to standard DIN 28 428, the base
pressure is that measured in a leak-free test
dome, 48 hours after the completion of test dome
bake-out, with a Turbopump fitted with a ConFlat
flange and using the recommended pre-vacuum
pump)
Custom ISO 160 F
KF 25
38000 rpm
< 4 minutes
DS 402, TriScroll 300
Any
+10 °C to +35 °C
80 °C at inlet flange max.
< 0.01 µm at inlet flange
permanent lubrication
Forced air
<55 dB(A) at 1 meter
100 - 240 Vac (± 10%)
50 - 60 Hz