(2) Ultrasonic cleaning
Cleaning time: 15 minutes or more
Detergent: Neutral enzyme type detergent (Diluted
concentration 1.0%)
(3) Rinsing
・ M ake sump water with running water, immerse
the case (tray) completely in water (tap water or
deionized water), shake the case (tray) 5 times up
and down.
・ R enew the water and shake the case (tray) 5 times
up and down in the water again.
・ P erform a series of rinsing operations three or
more times in total.
(4) Dry thoroughly.
Recommended drying condition: 110°C, 30
minutes or more
-16-