16
Instructions for Use
Pump Fixing
The following table describes, for each ISO-F flange, the required
number of steel screws class 12.9 and the tightening toque according
to Agilent's recommendations.
Tab. 3
FLANGE
ISO 200 F
ISO 250 F
The following table describes, for each CF flange, the required
number of screws class 12.9 and tightening torque according to
Agilent's recommendations.
The turbopump with ConFlat inlet flange must be fixed to the
vacuum chamber by means of the appropriate Agilent hardware. See
the appendix "Technical Information" for a detailed description.
Tab. 4
FLANGE
CFF10"
The TwisTorr 804 FS cannot be fixed by means of its base.
NOTE
266/344
SCREW SIZES
M10
M10
N.
24
TwisTorr 804 FS User Manual / 87-901-052-01
N.
FIXING TORQUE
12
40 Nm
12
40 Nm
FIXING TORQUE
25 Nm