Inlet Screen Installation; Water Cooling Connection - Varian Turbo-V 2K-G Mode D'emploi

OFF
MEANING
SET
18 B Vent/Purge Auto/Man diag status
7 - 4
B Vent/Purge Remote/Profibus diag status
3 - 0
19 B Interlock Mode diag status
7 - 4
B Set Point Logic diag status
3 - 0
20 B Heater Jacket Mode diag status
7 - 4
B Load Gas Type diag status
3 - 0
21 B Purge Gas Type diag status
7 - 4
B Start/Stop/Interlock Mode diag status
3 - 0
22 B Set Point Type diag status
7 - 4
B Analog Out Type
3 - 0
23 B Reserved
7 - 4
B Reserved
3 - 0

INLET SCREEN INSTALLATION

The inlet screen mod. 969-9138 prevents the
blades of the pump from being damaged by debris
greater than 5.2 mm diameter.
The inlet screen, however, does reduce the pump-
ing speed by about 10%.
The inlet screen is fitted in the upper part of the
pump, as shown in the figure.
It is welded to the center ring of the ISO 250 F vi-
ton gasket.
The screen can be removed as shown in the fol-
lowing figure.
The following figure shows the ISO 250 F pump
flange section with the protection screen fitted on
it. As you can see, the overall dimensions do not
change as the inlet screen remains inside the
pump profile.
!
If the chamber of the system is "baked" at a high
temperature, a shield should be installed to pre-
vent thermal radiation heating the high vacuum
flange on the pump. The maximum temperature
allowed for the inlet flange is 80n C.

WATER COOLING CONNECTION

The pumping system is supplied with a metallic
model water cooling kit.
93
TECHNICAL INFORMATION
CAUTION
87-900-968-01(C)