Table des Matières
Publicité
Liens rapides
Turbo-V70
969-9357 series
969-9358 series
969-9359 series
969-9360 series
87-900-860-01(E)
MARCH 2003
pumps
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian 969-9360 Série
Sommaire des Matières pour Varian 969-9360 Série
- Page 1 MANUALE DI ISTRUZIONI Turbo-V70 BEDIENUNGSHANDBUCH pumps NOTICE DE MODE DíEMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING 969-9357 series INSTRUKSTIONSBOG 969-9358 series BRUKSANVISNING 969-9359 series INSTRUKSJON MANUAL 969-9360 series OHJEKƒSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-860-01(E) MARCH 2003...
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Page 5: Table Des Matières
ISTRUZIONI PER LíUSO ....................1 GEBRAUCHSANLEITUNG....................3 MODE DíEMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRU«’ES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Istruzioni Per Líuso
Per garantire il massimo livello di funzionalit‡ ed affidabilit‡ delle Le pompe turbomolecolari della serie Turbo-V 70 devono essere pompe Turbomolecolari Varian, devono essere osservate le se- utilizzate solo con uno degli appositi controllori Varian (serie 969- guenti prescrizioni: 9405, 969-9505, 969-9507e 969-9508) e devono essere collegate •... - Page 7 Morsetto doppio 22 Nm In caso di guasto Ë possibile usufruire del servizio di riparazione con filettatura M10 Varian o del "Varian advanced exchange service", che permette di Morsetto singolo 11 Nm ottenere una pompa rigenerata in sostituzione di quella guasta.
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Page 8: Gebrauchsanleitung
Gasen sind und in denen Explosions- und erhˆhte Brandge- fahr besteht. Beim Betrieb m¸ssen folgende Umgebungsbedingungen ein- LAGERUNG gehalten werden: Um ein Hˆchstmafl an Effizienz und Zuverl‰ssigkeit der Varian − Maximaldruck: 2 Bar Turbomolekularpumpen zu gew‰hrleisten, sind die folgenden −... - Page 9 Pumpengheh‰use unter 50[C abgesunken ist. FLANSCH SCHELLENART ANZAHL ANZUGSMOMENT ISO 63 Doppelklemme mit 22 Nm Bei einem Defekt kann der Varian Service oder der " advanced NM10-Gewinde exchange service" in Anspruch genommen werden. Einzelklemme 11 Nm NM8-Gewinde ANMERKUNG Turbopumpen mit ConFlat-Eingangsflansch m¸ssen mit dem Vor dem Versand einer defekten Pumpe an die Fa.
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Page 10: Mode Díemploi
ÈlÈments devant Ítre exposÈs au vide. Mettre nie par Varian, avant d'utiliser l'appareil. Varian dÈcline par consÈ- toujours des gants ou toute autre protection appropriÈe. quent toute responsabilitÈ en cas d'inobservation totale ou partielle des instructions donnÈes, d'utilisation incorrecte de la part d'un... - Page 11 "advanced exchange service", remplir et faire parve- filetage M8 nir au bureau local Varian la fiche "SÈcuritÈ et SantÈ" annexÈe ‡ la prÈsente notice d'instructions. Une copie de cette fiche devra La turbopompe ‡ bride díentrÈe ConFiat doit Ítre fixÈe ‡ la cham- Ítre mise dans l'emballage de la pompe avant l'expÈdition.
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Page 12: Instrucciones De Uso
Varian los componentes destinados a someterse al vacÌo. Utilizar antes de utilizar el equipo. Varian se considera libre de cualquier siempre los guantes u otra protecciÛn apropiada. responsabilidad debida al incumplimiento total o parcial de las... - Page 13 En caso de averÌa se podr· utilizar el servicio de reparaciÛn BRIDA TIPO DE MORDAZA PAR DE Varian o el "Varian advanced exchange service", que permite APRIETE obtener una bomba regenerada para sustituir la averiada. ISO 63 Mordaza doble...
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Page 14: Instru«'Es Para O Uso
Para evitar problemas de perdas de g·s, n„o tocar com as m„os outra informaÁ„o adicional fornecida pela Varian antes de usar a os componentes destinados ‡ exposiÁ„o do v·cuo. Utilizar aparelhagem. - Page 15 FLANGE TIPO DE BORNE TORQUE Em caso de defeito È possÌvel usufruir do serviÁo de reparaÁ„o Varian ou do "Varian advanced exchange service", que permite ISO 63 Borne duplo com rosca 22 Nm obter uma bomba regenerada que substitua a bomba com defeito.
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Page 16: Gebruiksaanwijzingen
EEG milieurichtlijn 85/399. gebruiker wordt verzocht aandachtig deze handleiding en alle overige door Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet ATTENTIE! aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht... - Page 17 Enkelvoudige klem 11 Nm In geval van storing is het mogelijk om de reparatiedienst van met M8 Varian of de "Varian advanced exchange service" in te schakelen: schroefdraad zo krijgt men een ruilpomp ter vervanging van de defecte pomp. turbompomp...
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Page 18: Brugsanvisning
For at undg afgasningsproblemer skal man ikke r¯re med de Varian har leveret, inden udstyret tages i brug. Varian er ikke bare hÊnder de dele, der vil bliver udsat for vakuum. Brug altid ansvarlig, hvis vejledningen ikke er n¯je fulgt, eller hvis den kun er... - Page 19 "Advanced Exchange Service", skal man udfylde formularen Varian. For detaljer henvises til ìTeknisk informationî. "Sikkerhed og Helbred" vedlagt denne hÂndbog og tilsende den til For at fastspÊnde pumpen til fundamentet er det n¯dvendigt at den lokale forhandler.
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Page 20: Bruksanvisning
Utrustningen ‰r avsedd fˆr yrkesm‰ssig anv‰ndning. Anv‰ndaren VIKTIGT bˆr l‰sa denna bruksanvisning, samt ˆvrig dokumentation frÂn Varian fˆre anv‰ndning av utrustningen. Varian tar inget ansvar Komponenter som skall uts‰ttas fˆr vakuum fÂr inte hanteras med fˆr skador helt eller delvis till fˆljd av Âsidos‰ttande av bara h‰nder p g a kontamineringsrisken. - Page 21 ‰r l‰gre ‰n 50dC. Âtdragningsmoment de ska sp‰nnas. Om pumpen havererar, kontakta Varian reparationsverkstad eller Varian utbytesservice, som kan ers‰tta pumpen med en renoverad FLƒNS TYP AV ANTAL JTDRAGNINGS- pump.
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. FORSIKTIG Brukeren b¯r lese denne brukerveiledningen og all annen informasjon fra Varian f¯r utstyret tas i bruk. Varian kan ikke For  unng avgassingsproblemer, m ingen del som skal holdes ansvarlig for hendelser som skjer p grunn av manglende utsettes for vakuum hÂndteres med bare hendene. - Page 23 Varian. For detaljer henvises det til ìTeknisk informasjonî. For  feste pumpen til fundamentet er det n¯dvendig  bruke tre Dersom en pumpe skal kasseres, mÂ...
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Page 24: Kƒytt÷Ohjeet
KƒYTT÷OHJEET YLEISIƒ TIETOJA T‰m‰ laite on tarkoitettu ammattimaiseen k‰yttˆˆn. Ennen laitteen HUOMIO k‰yttˆˆnottoa tulee k‰ytt‰j‰n lukea huolellisesti mukana seuraava k‰yttˆohje sek‰ kaikki muu Varianin toimittama lis‰tieto. Varian ei Jotta kaasun poistumisongelmilta v‰ltytt‰isiin, tyhjiˆˆn ota vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden tarkoitettuihin osiin tule koskea paljain k‰sin. - Page 25 50e. tarpeellisen m‰‰r‰n ja kiristysmomentti. Laitteen vahingoittuessa mahdollista k‰ytt‰‰ Varianin korjauspalvelua tai "Varian advanced exchange service", joka LAIPPA KIINNIKE MƒƒRA KIRISTYSMO- mahdollistaa regeneroidun pumpun saamisen vahingoittuneen ENTTI tilalle. ISO 63...
- Page 26 £llh pr“ sqeth plhrofor∂a pou d∂nei h Varian, prin ap“ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kamm∂a euq⁄ nh “ son afor£ thn olikˇ ˇ merikˇ aq◊thsh odhgiËn, akat£llhlh...
- Page 27 Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj crhsimopoi“ ntaj kat£llhlo scetik“ Varian ˇ sto ìVarian advanced exchange serviceî, pou saj d∂nei th staqeropoiˇsete th b£sh.. H tourmpoantl∂a me fl£ntza eis“ dou ISO pr◊pei na sterewqe∂ sto dunat“ thta na antikatastˇsete thn calasm◊nh antl∂a me m∂a q£lamo keno⁄...
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Page 28: Instructions For Use
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, improper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 29 The turbopump with ISO inlet flange must be fixed to the vacuum chamber by means of clamps or claws. The following table shows, In the case of breakdown, contact your local Varian service center for each flange and fixing device, the necessary number of clamps who can supply a reconditioned pump to replace that broken or claws and the relevant fixing torque.
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Page 30: Technical Information
TECHNICAL INFORMATION The turbine is made of high-strength, light alumin- DESCRIPTION OF THE TURBOPUMP ium alloy, and is machined from a single block of The Turbo-V70 pump is available in four versions. aluminium. The turbine blades have five different The difference between the two versions lies angles, from 42°... -
Page 31: Technical Specification
Rotational speed 75000 RPM Installation category Start-up time < 60 seconds Pollution degree Recommended fore- mechanical: Varian SD-40 pump /h (1.2 CFM) Storage temperature - 20o C to + 70o C Operating position Weight kg (lbs) ISO: 1.6 (6) CFF: 2.3 (4) - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed against inlet pressure Graph of compression ratio against foreline pressure Graph of nitrogen throughput against inlet pressure using the recommended mechanical forevacuum pump 87-900-860-01(E)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION The screen can be mounted on either pump series INLET SCREEN INSTALLATION and is supplied with a small tab for easy removal (see figure). The inlet screens mod. 969-9300 and 969-9309 prevent the blades of the pump from being dam- aged by debris greater than 0.7 mm diameter. -
Page 34: Heater Band Installation
TECHNICAL INFORMATION Switch on the heater while the turbopump is in op- HEATER BAND INSTALLATION eration. If, for any reason, the turbopump body overheats, it will be automatically cut out by the thermistor sensor. NOTE The turbopump must be "baked" only when operating with an inlet pressure less than 10 mbar and with water cooling. -
Page 35: Water Cooling Kit Installation
TECHNICAL INFORMATION WATER COOLING KIT INSTALLATION Two types of water cooling kits are available to be mounted when the pump is used under heavy load conditions or when air cooling is insufficient. The two model part numbers are: 969-9337 (me- tallic model), and 969-9347 (plastic model). -
Page 36: Base Fixing Kit Installation
TECHNICAL INFORMATION Insert the three feed as shown in the figure, bear- BASE FIXING KIT INSTALLATION ing in mind that the position must be as indicated in the figure. The kit mod. 969-9326 enables the pump to be fixed at the base. Open the package containing the feet and respec- tive screws. -
Page 37: Air Cooling Kit Installation
TECHNICAL INFORMATION AIR COOLING KIT INSTALLATION SIDE MOUNTING A fan kit model 969-9310 is available for air cool- ing the pump, when natural air convenction is in- sufficient. Fan specification: The fan can also be mounted under the pump as −... -
Page 38: Vent Valve Installation
TECHNICAL INFORMATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 enables undesired pump areation during a temporary power failure (5 sec maximum) to be avoided, and enables an automatic vent operation. Unscrew the threaded plug. VENT DEVICE INSTALLATION Screw the adapter (1) into the vent hole (2) of the pump. -
Page 39: Vibration Isolator Installation
TECHNICAL INFORMATION Screw the flange mod. 969-9109 on the pump, TYPICAL LAYOUT DIAGRAM taking care of the o-ring right position. Assemble the seal ring and lock the vent device in position using the KF klamp. Turbo-V controller Vent valve VIBRATION ISOLATOR INSTALLATION Vacuum pump shut-off valve (optional) A vibration damper model 969-9340 for ISO 63 System vent valve (optional) -
Page 40: Connection A - High Vacuum Flange
TECHNICAL INFORMATION For ConFlat flange connections we recommend Connection A - HIGH VACUUM FLANGE using Varian hardware. To connect the Turbo-V70 pump to the ISO inlet flange, remove the outer ring and position the cen- To facilitate assembly and dismantling, apply Fel- tering ring as shown in the figure. -
Page 41: Connection B - Fore-Vacuum Pump
Base fixing kit 969-9326 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. The turbopump is connected to the controller through an 6-pin connector. Pins B, C and D are the 3-phase supply to the motor, pins A and F are connected to the temperature sensor (NTC type, 30 KΩ... - Page 42 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 43 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 44 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...