Table des Matières
Publicité
Liens rapides
Navigator
Model 969-9388
Model 969-9389
Model 969-9390
Model 969-9391
Model 969-9392
Model 969-9393
Model 969-9394
Model 969-9395
87-900-924-01(B)
APRIL 2002
TV 141
RS485
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian TV 141
Sommaire des Matières pour Varian TV 141
- Page 1 MANUALE DI ISTRUZIONI TV 141 BEDIENUNGSHANDBUCH Navigator NOTICE DE MODE DíEMPLOI RS485 MANUAL DE INSTRUCCIONES MANUAL DE INSTRU«’ES Model 969-9388 BEDRIJFSHANDLEIDING Model 969-9389 INSTRUKSTIONSBOG Model 969-9390 BRUKSANVISNING Model 969-9391 Model 969-9392 INSTRUKSJON MANUAL Model 969-9393 OHJEKƒSIKIRJA Model 969-9394 ODHGIES CRHSEWS...
- Page 2 TV 141 Navigator RS 485...
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Page 5: Table Des Matières
BRUKSANVISNING ......................15 BRUKERVEILEDNING ...................... 17 KƒYTT÷OHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE....................23 TECHNICAL INFORMATION .................... 25 DESCRIPTION OF THE TV 141 NAVIGATOR ................25 Pump Description.......................25 Controller Description......................26 TECHNICAL SPECIFICATION ....................26 TV 141 NAVIGATOR OUTLINE....................27 INTERCONNECTIONS........................27 Connection A (P1) - Vent ....................29... -
Page 6: Istruzioni Per Líuso
Durante l'operazione di disimballaggio, prestare particolare attenzione a non lasciar cadere il TV 141 Navigator e a non sottoporlo ad urti o vibrazioni. disperdere l'imballo nell'ambiente. - Page 7 COMMUNICATION con filettatura M8 DESCRIPTIONî nellíappendice ìTechnical Informationî). Il LED verde LD1 posto sul pannello della base del TV 141 La turbopompa con flangia di ingresso ConFlat deve essere Navigator indica, con la frequenza del suo lampeggio, le fissata alla camera da vuoto per mezzo dell'apposita minuteria condizioni operative del sistema: meccanica Varian.
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Page 8: Gebrauchsanleitung
Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Miflachtung der nationalen einschl‰gigen Normen ¸bernimmt die Firma Varian keinerlei Haftung. Modell TV 141 Navigator ist ein integriertes System, das aus einer Turbomolekularpumpe f¸r Hoch- und Hˆchstvakuum- anwendungen, integriert mit einem entsprechenden Controller, besteht. - Page 9 DESCRIPTION" im Anhang "Technical Information"). speziellen Varian-Befestigungsmaterial Vakuum Die gr¸ne LED LD1 an der Bodenplatte von Modell TV 141 gibt kammer anzuschlieflen. F¸r ausf¸hrliche Informationen siehe mit der H‰ufigkeit ihres Blinkens die Betriebsbedingungen des im Anhang "Technical Information". System an:...
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Page 10: Mode Díemploi
Navigator est totalement exempt d'agents polluants et il est par consÈquent indiquÈ pour toutes les applications exigeant un vide "propre". Le TV 141 Navigator est en outre dotÈ de connecteurs auxiliaires permettant d'alimenter un ventilateur supplÈmentaire, de commander la soupape de ventilation, de le piloter ‡... - Page 11 ‡ filet M8 DESCRIPTION" dans l'appendice "Technical Information"). La LED verte LD1 placÈe sur le panneau de la base du TV 141 La turbopompe ‡ bride d'entrÈe ConFlat doit Ítre fixÈe ‡ la indique, par sa frÈquence de clignotement, les conditions chambre ‡...
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Page 12: Instrucciones De Uso
Durante la operaciÛn de desembalaje, tener cuidado de que no se caiga el TV 141 Navigator y de no someterlo a golpes o vibraciones. No abandonar el embalaje en el medio ambiente. El material es completamente reciclable y cumple con la directiva CEE 85/399 para la preservaciÛn del medio ambiente. - Page 13 (vÈase el apartado ìRS 485 COMMUNICATION DESCRIPTIONî en el anexo ìTechnical Informationî). La turbobomba con brida de entrada ConFlat ha de fijarse a la El LED verde LD1 situado en el panel de la base del TV 141 c·mara de vacÌo mediante los accesorios mec·nicos...
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Page 14: Instru«'Es Para O Uso
Para ulteriores ARMAZENAGEM detalhes, consultar o apÍndice "Technical Information". O TV 141 Navigator deve ser ligado a uma bomba prim·ria Durante o transporte e a armazenagem do TV 141 Navigator, (consultar esquema em "Technical Information"). - Page 15 INSTRU«’ES DE USO O TV 141 Navigator pode ser instalado em qualquer posiÁ„o. Fixar o TV 141 Navigator em posiÁ„o est·vel ligando o flange ! ! ! ! de entrada da turbobomba a um contra-flange fixo capaz de PERIGO! resistir a um torque de 1000 Nm ao redor do prÛprio eixo.
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Page 16: Gebruiksaanwijzingen
Zorg er bij het uitpakken voor dat de TV 141 Navigator niet kan vallen en geen stoten of trillingen te verduren krijgt. Laat... - Page 17 DESCRIPTIONî in de bijlage ìTechnical Informationî). met M8 schroefdraad De groene LED LD1 op het paneel van de basis van de TV 141 geeft door de frequentie van zijn knipperen, de werkcondities De turbompomp met ConFlat inlaatflens moet aan de van het systeem aan: vacu¸mpomp worden bevestigd met behulp van de speciale...
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Page 18: Brugsanvisning
TV 141 Navigator leveres i en speciel beskyttende emballage. Kontakt den lokale forhandler, hvis emballagen viser tegn p skader, der kan vÊre opstÂet under transporten. S¯rg for, at TV 141 Navigator ikke tabes eller udsÊttes for st¯d ved udpakningen. Smid ikke emballagen ud. Materialet kan genbruges 100% og opfylder EU-direktiv 85/399 om milj¯beskyttelse. - Page 19 ìTeknisk Informationî). Turbopumpen med ConFlat indl¯bsflange skal tilsluttes p Den gr¯nne LED LD1, der er anbragt p panelet p TV 141ís vakuumkammeret ved hjÊlp af Varian monteringsudstyret. I fundament, angiver systemets funktion ved blink: bilaget ìTeknisk Informationî findes yderligere detaljer.
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Page 20: Bruksanvisning
Kontakta det lokala fˆrs‰ljningskontoret om emballaget visar VIKTIGT ! tecken p skador som kan ha uppstÂtt under transporten. Se Ta bort tejpen och skyddsproppen fˆrst n‰r turbopumpen ska till att TV 141 Navigator inte tappas eller uts‰tts fˆr stˆtar vid anslutas till systemet. uppackningen. Kasta... - Page 21 Turbopumparna med intagsfl‰ns ConFlat ska f‰stas till vakuumkammaren med hj‰lp av Varian f‰stdelar. Fˆr detaljer Om du vill st‰nga av TV 141 Navigator behˆver du bara dra ut h‰nvisas till bilaga îTechnical Informationî. elkabeln ur v‰gguttaget. Den inbyggda styrenheten avbryter omedelbart pumpens funktion.
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Page 22: Brukerveiledning
Viser denne tegn p skader som kan ha oppstÂtt under transporten, m du ta kontakt med det lokale salgskontoret. NÂr TV 141 Navigator pakkes ut, m du se til at det ikke slippes ned eller utsettes for noen form for st¯t. - Page 23 BRUKERVEILEDNING TV 141 Navigator kan monteres i en valgfri stilling. Fest TV 141 Navigator i en stabil stilling med inngangsflensen festet ! ! ! ! mot en fast koplingsflens med et dreiemoment p 221 Nm ADVARSEL! rundt aksen. Turbopumpene med ISO innl¯psflens skal festes NÂr pumpen brukes for Â...
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Page 24: Kƒytt÷Ohjeet
Yksityiskohtaiset tiedot lˆytyv‰t osasta "Tekniset tiedotî. T‰m‰ k‰sikirja k‰ytt‰‰ seuraavanlaisia merkintˆj‰: HUOM ! ! ! ! TV 141 Navigator ei vahingoitu ollessaan kosketuksissa ilman VAARA! kanssa (auki). On kuitenkin suositeltavaa pit‰‰ se suljettuna, Vaara-merkit saavat k‰ytt‰j‰n... - Page 25 11 Nm Startî -menetelm‰ll‰, tulee yll‰mainittu tapa aktivoida uudelleen kiinnike, kierteitys M8 ohjelmiston kautta (ks. kappale ìRS 485 VIESTINNƒN KUVAUSî ìTekniset tiedotî -liitteess‰). Vihre‰ LED LD1, joka sijaitsee TV 141:n perustan paneelissa, Turbopumppu ConFlat-sis‰‰ntulolaipalla tulee kiinnitt‰‰ osoittaa vilkkumistiheydell‰‰n j‰rjestelm‰n toimintaolosuhteet: tyhjiˆkammioon sopivien Varianin mekaanisten varusteiden...
- Page 26 APOQHKEUSH APOQHKEUSH Se parous∂a hlektromagnhtikËn ped∂wn h antl∂a pr◊pei na Kat£ th di£rkeia thj metafor£j kai thj apoqˇkeushj tou TV 141 prostate⁄etai me kat£llhla prokal⁄mmata. Bl◊pe to par£rthma Navigator pr◊pei na thro⁄ntai oi ak“louqej periballontik◊j ¯Tecnik◊j Plhrofor∂ej¯ gia periss“terej leptom◊reiej.
- Page 27 /Enaush kai Crˇsh tou /Enaush kai Crˇsh tou /Enaush kai Crˇsh tou q◊sh. StereËste to TV 141 Navigator se staqerˇ q◊sh enËnontaj Gia na an£yete to TV 141 arke∂ na promhqe⁄sete thn t£sh th fl£ntza eis“dou thj tourmpoantl∂aj me m∂a staqerˇ controller trofod“thshj.
- Page 28 "clean" vacuum. The TV 141 Navigator is equipped with auxiliary connectors to supply an additional fan, to control the vent valve, to be controlled from a remote site by means of an host computer connected through a serial line.
- Page 29 Switching on and Use of TV 141 Navigator uum chamber by means of clamps or claws. The following ta- To switch on the TV 141 Navigator it is necessary to supply the ble shows, for each flange and fixing device, the necessary mains.
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Page 30: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE TV 141 NAVIGATOR The TV 141 Navigator pumping system consists of a pump with an integrated controller and is avail- able in four models supplied with an USA standard plug, and other four models supplied with an Euro- pean standard plug. -
Page 31: Controller Description
ISO 100, ISO 63, CFF 6", CFF 4.5î Foreline flange KF 16 NW Rotational speed 62000 rpm < 90 seconds Start-up time Recommended Mechanical: Varian SD 40 forepump Diaphragm: MD12 Operating position Operating ambient See the following diagram temperature (see the following note) Bakeout temperature 120i C at inlet flange max. -
Page 32: Tv 141 Navigator Outline
ISO 100/63: 3.5 (7.7) Pressure versus temperature diagram NOTE When the TV 141 Navigator has been stored at a tem- perature less than 5NC, wait until the TV 141 Navigator has reached the above mentioned temperature. TV 141 NAVIGATOR OUTLINE The following figure shows the TV 141 Navigator outline. - Page 33 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure (with inlet screen) Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-924-01(B)
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Page 34: Interconnections
TECHNICAL INFORMATION INTERCONNECTIONS Connection C (P3) - IN-OUT The following figure shows the TV 141 intercon- nections. This connector carries all the input and output sig- nals to remote control the TV 141. The available signals are the following: − START: input signal to start or stop the pump. -
Page 35: Connection D (J4) - Serial
(5 sec. maximum) and enables an automatic vent operation. An auxiliary fan (mod. 969-9323) is available to improve the TV 141 cooling during heavy opera- tional conditions. To install the vent valve, unscrew the threaded plug (see figure below). -
Page 36: Purge Valve Installation
The optional RS 485 cable (969-9881) must be or- Do not overtighten the valve as this may damage dered when the TV 141 Navigator has to be con- the thread on the pump. trolled by means of a remote computer. -
Page 37: Rs 485 Communication Description
TECHNICAL INFORMATION RS 485 COMMUNICATION DESCRIPTION DATA TYPE FIELD VALID LENGTH CHARACTERS Communication Format Logic (L) ë0í = OFF ë1í = ON • 8 data bit Numeric (N) ë-ë, ë.í, ë0í . . . ë9í right justified with ë0í • no parity Alphanumeric from blank to ë_í... -
Page 38: Window Meanings
TECHNICAL INFORMATION Example: Window Meanings Read/ Data Description Admitted − writing request of logic window n. 10 with the Write Type Values logic value ë0í (OFF): Start/Stop Start = 1 MASTER to SLAVE: <0x02> + <0x80> + (in remote Stop = 0 <í010í>... -
Page 39: Accessories And Spare Parts
Off = 0 by the reset (on = command) (default = 1) closed) Pump life in 0 to 4x10 Reserved to Varian service hours (ze- roed by the reset com- Set the vent Automatic = 0 mand) valve (see note 1.) - Page 40 NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
- Page 41 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 42 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...