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Turbo-V 2K-G
Pumping System
969-8871
969-8873
87-900-968-01(C)
MAY 2005
Models
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE DíEMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRU«'ES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKƒSIKIRJA
ODHGIES CRHSEWS
FELHASZN¡L"I K...ZIK÷NYV
PODRECZNIK INSTRUKCJI
N¡VOD K POUéITÕ
N¡VOD NA OBSLUHU
PRIROČNIK ZA NAVODILA
INSTRUCTION MANUAL

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  • Page 1 MANUALE DI ISTRUZIONI BEDIENUNGSHANDBUCH NOTICE DE MODE DíEMPLOI Turbo-V 2K-G MANUAL DE INSTRUCCIONES Pumping System MANUAL DE INSTRU«’ES BEDRIJFSHANDLEIDING Models INSTRUKSTIONSBOG 969-8871 BRUKSANVISNING 969-8873 INSTRUKSJON MANUAL OHJEKƒSIKIRJA ODHGIES CRHSEWS FELHASZN¡L”I K…ZIK÷NYV PODRECZNIK INSTRUKCJI N¡VOD K POUéITÕ N¡VOD NA OBSLUHU PRIROČNIK ZA NAVODILA...
  • Page 2 Turbo-V 2K-G...

  • Page 5: Table Des Matières

    INSTRUKCJA UZYTKOWANIA........................49 PŘÕRUČKA K POUéITÕ.............................53 N¡VOD K POUéITIU............................57 NAVODILA ZA UPORABO..........................61 INSTRUCTIONS FOR USE..........................65 TECHNICAL INFORMATION ...........................69 DESCRIPTION OF THE TURBO-V 2K-G..................69 Pump Description ......................69 Controller Description ......................70 TECHNICAL SPECIFICATION ....................70 TURBO-V 2K-G OUTLINE......................73 INTERCONNECTIONS........................73 J1 ñ REMOTE I/O ......................73 J2 - Serial...........................76...

  • Page 6: Indicazioni Di Sicurezza

    ISTRUZIONI PER L'USO Indicazioni di Sicurezza Pompe Turbomolecolari Le pompe Turbomolecolari descritte nel seguente Manuale di Istruzioni hanno una elevata quantit‡ di energia cinetica dovuta alla alta velocit‡ di rotazione in unione alla massa speci- fica dei loro rotori. Nel caso di un guasto del sistema, ad esempio per un contatto tra rotore e statore o per una rottura del rotore, l'energia di rotazione potrebbe essere rilasciata.

  • Page 7: Informazioni Generali

    Durante l'operazione di disimballaggio, prestare particolare ritiene sollevata da eventuali responsabilit‡ dovute all'inosser- attenzione a non lasciar cadere la Turbo-V 2K-G e a non sotto- vanza totale o parziale delle istruzioni, ad uso improprio da porla ad urti o vibrazioni.
  • Page 8 Quando la pompa viene utilizzata per il pompaggio di gas tos- sici, infiammabili o radioattivi, seguire le appropriate procedure La Turbo-V 2K-G non puÚ essere fissata tramite la sua base. Il tipiche di ciascun gas. sistema puÚ essere fissato solo tramite la sua flangia ISO 250F. Il Non usare la pompa in presenza di gas esplosivi.

  • Page 9: Come Arrestare La Turbo-V 2K-G

    Turbo-V 2K-G occorre staccare il cavo di alimentazione dall'a- PERICOLO! limentazione. Quando viene fornita l'alimentazione ed il controconnettore a 15 pin in dotazione Ë inserito, la Turbo-V 2K-G si avvia automa- MANUTENZIONE ticamente. La Turbo-V 2K-G non richiede alcuna manutenzione. Qualsiasi intervento deve essere eseguito da personale autorizzato.

  • Page 10: Sicherheitshinweise

    GEBRAUCHSANLEITUNG Sicherheitshinweise f¸r Turbomolekularpumpen Die in der folgenden Gebrauchsanweisung beschriebenen Turbomolekularpumpen verf¸- gen aufgrund der hohen Rotationsgeschwindigkeit in Verbindung mit dem spezifischen Ge- wicht ihrer Rotoren ¸ber eine grofle Menge kinetischer Energie. Im Falle eines Systemdefekts, z.B. durch einen Kontakt zwischen Rotor und Stator oder durch einen Rotorbruch, kˆnnte diese Rotationsenergie freigesetzt werden.

  • Page 11: Allgemeine Informationen

    Normen ¸bernimmt die Firma Varian grund des hohen Gewichtes (35 kg), die drei um 120w versetz- keinerlei Haftung. ten ÷senschrauben zu benutzen, die am Pumpenkorpus ange- Modell Turbo-V 2K-G ist ein integriertes System, das aus einer schraubt sind. Turbomolekularpumpe f¸r Hoch- Hˆchstvakuum-...
  • Page 12 ÷senschrauben zu benutzen, die in die Gewindeboh- toren zu verwenden. rungen am Pumpenkorpus eingeschraubt sind. Der Turbo-V 2K-G hat Verbinder f¸r den Ein-und Ausgang und die Schnittstellenkommunikation, die an die Auflenkreise ange- schlossen werden m¸ssen, sodafl kein Teil unter Spannung zug‰nglich ist .

  • Page 13: Stillsetzung Der Turbo-V 2K-G

    Ger‰t an das Netz anschlieflen. Stillsetzung der Turbo-V 2K-G Druck in der Vakuumkammer auf 0,1 mbar bringen. F¸r die Erteilung des Signals START an die Turbo-V 2K-G F¸r die Stillsetzung der Pumpe gibt es die folgenden Mˆglich- gibt es die folgenden Mˆglichkeiten: keiten: Mitgelieferten E/A-Gegenkonnektor anschlieflen.

  • Page 14: Normes De Sècuritè

    MODE DíEMPLOI Normes de sÈcuritÈ pour Pompe TurbomolÈculaires Les pompes TurbomolÈculaires dÈcrites dans le Manuel d'Instructions suivant ont une Ènergie cinÈtique ÈlevÈe due ‡ la grande vitesse de rotation associÈe ‡ la masse spÈcifique de leurs rotors. En cas de panne du systËme, par exemple ‡ cause d'un contact entre rotor et stator ou d'une rupture du rotor, l'Ènergie de rotation pourrait Ítre libÈrÈe.

  • Page 15: Indications Generales

    Pendant l'opÈration d'ouverture de l'emballage, veiller tout par- dÈcline par consÈquent toute responsabilitÈ en cas de non ticuliËrement ‡ ne pas laisser tomber le Turbo-V 2K-G et ‡ ne respect total ou partiel des instructions donnÈes, d'utilisation lui faire subir aucun choc et aucune vibration.
  • Page 16 ÈlevÈe peut Ítre ‡ l'origine de lÈsions graves. tÈgÈe ‡ l'aide d'Ècrans appropriÈs. Pour tout autre renseigne- ment, se reporter ‡ l'opuscule "Technical Information". Le Turbo-V 2K-G doit Ítre connectÈ ‡ une pompe primaire (Cf. ATTENTION! schÈma dans "Technical Information").

  • Page 17: Entretien

    Varian ou du "Varian advanced exchange service" qui NOTE permet d'obtenir un systËme rÈgÈnÈrÈ en remplacement du Lors de la premiËre mise en marche de la pompe Turbo-V 2K-G systËme endommagÈ. le contrÙleur lance automatiquement le systËme en exÈcutant une procÈdure spÈciale qui protËge les paliers contre tout ris-...

  • Page 18: Indicaciones De Seguridad

    INSTRUCCIONES DE USO Indicaciones de Seguridad para Bombas Turbomoleculares Las bombas Turbomoleculares descritas en el siguiente manual de instrucciones tienen una elevada cantidad de energÌa cinÈtica debido a la alta velocidad de rotaciÛn en combi- naciÛn a la masa especÌfica de sus rotores. En el caso de un daÒo del sistema, por ejemplo por un contacto entre el rotor y el estator o por una rotura del rotor, la energÌa de rotaciÛn podrÌa ser liberada.

  • Page 19: Almacenamiento

    Durante la operaciÛn de desembalaje, tener cuidado de que no responsabilidades debidas al incumplimiento total o parcial de se caiga el Turbo-V 2K-G y de no someterlo a golpes o las instrucciones, al uso impropio por parte de personal no vibraciones.
  • Page 20 Perno con rosca M10 22 Nm  °PELIGRO! NOTA La Turbo-V 2K-G no puede ser fijada por medio de su base. En Cuando la bomba se utiliza para bombear gases tÛxicos, efecto, el sistema puede fijarse ˙nicamente mediante su brida inflamables radioactivos,...

  • Page 21: Uso De Turbo-V 2K-G

    0,1 mbar la presiÛn en el interior de la c·mara de vacÌo; La detenciÛn de la bomba podr· efectuarse aplicando una de dar la seÒal de START a la Turbo-V 2K-G mediante una las siguientes modalidades: de las siguientes formas:...

  • Page 22: Instru«'Es Para O Uso

    INSTRU«’ES PARA O USO IndicaÁıes de SeguranÁa para Bombas Turbomoleculares As bombas turbomoleculares descritas no seguinte Manual de InstruÁıes tÍm uma alta quantidade de energia cinÈtica devida ‡ alta velocidade de rotaÁ„o unida ‡ massa especÌfi- ca de seus rotores. Em caso de avaria do sistema, causada por exemplo por um contacto entre o rotor e o e- stator ou uma ruptura do rotor, a energia de rotaÁ„o pode ser liberada.
  • Page 23 Devido ao seu peso (35 kg), para retirar a bomba da especÌficas. embalagem È necess·rio utilizar as trÍs cavilhas fixadas a 120Y O Turbo-V 2K-G È um sistema integrado, constituÌdo por uma ao corpo da bomba. bomba turbomolecular para aplicaÁıes de alto e ultra-alto N„o depositar a embalagem no meio ambiente.
  • Page 24 M10.  PERIGO! NOTA Quando a bomba È utilizada para bombear gases tÛxicos, A Turbo-V 2K-G n„o pode ser fixada por meio da sua base. O inflam·veis radioactivos, seguir procedimentos sistema pode ser segurado sÛ por intermÈdio da sua flange adequados tÌpicos para cada g·s.
  • Page 25 Como parar a Turbo-V 2K-G atingir 0,1 mbars. Para parar a bomba È possÌvel utilizar um dos seguintes fornecer ‡ Turbo-V 2K-G o sinal de START num dos mÈtodos: seguintes modos: retirando o conector conjugado de I/O fornecido de sÈrie.

  • Page 26: Veiligheidsinstructies

    GEBRUIKSAANWIJZINGEN Veiligheidsinstructies voor Turbomoleculaire pompen De turbomoleculaire pompen die in deze handleiding worden besproken hebben een grote hoeveelheid kinetische energie door de hoge rotatiesnelheid samen met de specifieke massa van hun rotoren. In geval van een defect van het systeem, bijvoorbeeld door een contact tussen de rotor en de stator of doordat de rotor breekt, kan de rotatie-energie vrijkomen.

  • Page 27: Algemene Informatie

    Zorg er bij het uitpakken voor dat de Turbo-V 2K-G niet kan acht nemen van de aanwijzingen, onoordeelkundig gebruik vallen en geen stoten of trillingen te verduren krijgt.

  • Page 28: Installatie

    De Turbo-V 2K-G kan in alle standen worden geÔnstalleerd. ders beschadigd raken. Bevestig de Turbo-V 2K-G in een stabiele positie en verbind de inlaatflens van de turbopomp met een vaste contraflens die een Gebruik voor de luchttoevoer naar de pomp lucht of inert gas koppel van 10600 Nm rondom de eigen as kan verdragen.
  • Page 29 Hoe wordt de Turbo-V 2K-G gestopt breng de druk in de vacu¸mkamer op 0,1 mbar geef aan de Turbo-V 2K-G het START signaal op een Om de pomp te stoppen, kan ÈÈn van de volgende methoden van de volgende manieren:...

  • Page 30: Sikkerhedsanvisninger

    BRUGSANVISNING Sikkerhedsanvisninger MolekylÊre turbopumper De molekylÊre turbopumper, der er beskrevet i nÊrvÊrende brugsanvisning, har en stor kinetisk energi, der skyldes den h¯je omdrejningshastighed kombineret med deres rotorers specifikke vÊgt. Hvis der er en fejl i systemet, for eksempel p grund af en kontakt mellem rotor og stator, eller fordi rotoren gÂr i stykker, kan omdrejningsenergien spredes.
  • Page 31 Varian, f¯r udstyret anvendes. Varian tager ikke skader, der kan vÊre opstÂet under transporten. ansvar for skader helt eller delvis som f¯lge af tilsidesÊttelse af S¯rg for, at Turbo-V 2K-G ikke tabes eller udsÊttes for st¯d disse instruktioner, fejlagtig brug af personer uden tilstrÊkkeligt ved udpakningen.
  • Page 32 VIGTIGT! til de spÊndingsf¯rende dele. KontrollÈr, at anordningen, der er tilsluttet Turbo-V 2K-G, har en Fjern f¯rst den fastboltede afskÊrmning, nÂr turbopumpen er passende isolering. Dette gÊlder ogs i tilfÊlde af enkeltfejl blevet sluttet til systemet.
  • Page 33 "Technical "RS232/485 Communication Description" i bilaget Information"). "Technical Information"). N¯dstop Afbrydelse af Turbo-V 2K-G i n¯dsituationer sker ved at koble  ADVARSEL! ledningen fra styreenheden. Turbo-V 2K-G starter automatisk efter tilslutning af str¯m og VEDLIGEHOLDELSE indsÊttelse af den medleverede 15-benede kontakt.

  • Page 34: Bruksanvisning

    BRUKSANVISNING S‰kerhetsanvisningar fˆr Molekyl‰ra turbopumpar De molekyl‰ra turbopumparna som beskrivs i bruksanvisningen har en hˆg kinetisk energi beroende p den hˆga rotationshastigheten och rotorernas specifika massa. I det fall fel skulle uppst i systemet, t ex p grund av kontakt mellan rotor och stator eller om rotorn skulle skadas, kan det h‰nda att rotationsenergin frigˆrs.
  • Page 35 Varian fˆre anv‰ndning av utrustningen. tecken p skador som kan ha uppstÂtt under transporten. Se till Varian tar inget ansvar fˆr skador helt eller delvis till fˆljd av att Turbo-V 2K-G inte tappas eller uts‰tts fˆr stˆtar vid Âsidos‰ttande av instruktionerna, ol‰mplig anv‰ndning av...
  • Page 36 Turbo-V 2K-G mÂste anslutas till en huvudpump (se schemat i "Technical information"). VIKTIGT! Turbo-V 2K-G kan installeras i valfri position. F‰st pumpen i ett stabilt l‰ge genom att ansluta pumpens intagsfl‰ns till en fast Undvik sammanstˆtningar, sv‰ngningar...
  • Page 37 BRUKSANVISNING Systemet ‰r utrustat med en grˆn LED fˆr statussignal. Anv‰ndning av Turbo-V 2K-G Den grˆna lysdioden LD1 p underdelen av TURBO-V 2K-G Hur du startar systemet anger, genom frekvensen av dess blinkningar, hur systemet fungerar: Kontrollera innan du startar systemet att I/O-kontakten har •...

  • Page 38: Turbomolekylêr Pumper

    BRUKERVEILEDNING Sikkerhetsanvisninger TurbomolekylÊr Pumper TurbomolekylÊr pumpene som er beskrevet i den f¯lgende Bruksanvisningen har et h¯yt kinetisk energiniv som skyldes den h¯ye roteringshastigheten i tillegg til den spesifikke massen til pumpenes rotor. I tilfelle feil ved systemet, for eksempel p grunn av en kontakt mellom rotor og stator eller brudd pÂ...

  • Page 39: Generell Informasjon

    NÂr Turbo-V 2K-G pakkes ut, m du se til at det ikke slippes manglende oppf¯lging av disse instruksjonene, selv delvis, ned eller utsettes for noen form for st¯t.
  • Page 40 Forsikre deg om at isoleringen av anordningen Ikke ta av det fastskrudde dekslet f¯r turbopumpen koples til koplet til Turbo-V 2K-G har en egnet isolering, ogs under systemet. forhold med en enkel feil i f¯lge EN 61010-1 standarden.
  • Page 41 Hvordan stoppe Turbo-V 2K-G F¯r trykket i vakuumkammeret til 0,1 mbar. Stopp pumpen p en av f¯lgende mÂter: Gi et startsignal til Turbo-V 2K-G p en av f¯lgende mÂter: Kople fra I/O kontakten som f¯lger med. Kople til I/O kontakten som f¯lger med.

  • Page 42: Kƒytt÷Ohjeet

    KƒYTT÷OHJEET Turbomolekyylipumppujen Turvaohjeet T‰ss‰ k‰yttˆohjeessa kuvatuissa turbomolekyylipumpuissa on korkea m‰‰r‰ kineettist‰ energiaa, joka aiheutuu korkeasta pyˆrimisnopeudesta yhdistettyn‰ pumppujen roottorien massaan. J‰rjestelm‰n vikatilassa, esimerkiksi roottorin ja staattorin koskettaessa toisiaan tai roottorin rikkoutuessa, pyˆrimisenergia saattaa vapautua.  VAARA! T‰ss‰ k‰yttˆohjeessa kuvattuja asennusohjeita on noudatettava tarkasti laitteiston vaurioitumisen ja k‰ytt‰jien vahingoittumisen v‰ltt‰miseksi! 87-900-968-01(C)

  • Page 43: Valmistelut Asennusta Varten

    Varianin toimittamat lis‰tiedot. Varian ei ota vaurioita, ottakaa yhteys paikalliseen myyntitoimistoon. vastuuta seurauksista, jotka johtuvat laitteen k‰yttˆohjeiden Pakkauksen purkamisen aikana tulee varoa erityisesti Turbo-V t‰ydellisest‰ osittaisesta laiminlyˆnnist‰,...
  • Page 44 V‰lt‰ kolhuja, heiluntaa tai ‰kkiliikkeit‰ turbopumpun toiminnan -liitteest‰. aikana, sill‰ laakerit voivat vahingoittua. Turbo-V 2K-G tulee kytke‰ p‰‰pumppuun (ks. ìTekniset tiedotî K‰yt‰ pumpun ilmansyˆttˆˆn ilmaa tai jalokaasua, joissa ei ole -liitteen kaaviota). pˆly‰ tai hiukkasia. Erityisen aukon l‰pi syˆtett‰v‰n paineen Turbo-V 2K-G voidaan asentaa mihin tahansa asentoon.
  • Page 45 KƒYTT÷OHJEET J‰rjestelm‰ on varustettu vihre‰ll‰ LED-valolla, jota ohjataan Turbo-V 2K-G -pumpun k‰yttˆ tilasignaalilla. J‰rjestelm‰n k‰ynnistys Vihre‰ LED LD1, joka sijaitsee TURBO-V 2K-G:n perustan paneelissa, osoittaa vilkkumistiheydell‰‰n j‰rjestelm‰n Tarkista ennen j‰rjestelm‰n k‰ynnistyst‰, ett‰ I/O-liitin on toimintaolosuhteet: poistettu. Jos j‰rjestelm‰ on kytketty I/O-et‰laitteeseen, varmista ett‰...
  • Page 46 ODHGIES CRHSHS Οδηγίες για Ασφάλεια για Μοριακές Αντλίες Στροβίλου Οι µοριακές αντλίες στροβίλου, όπως περιγράφονται στο ακόλουθο εγχειρίδιο λειτουργίας περιέχουν ένα µεγάλο ποσό κινητικής ενέργειας, λόγω της υψηλής ταχύτητας περιστροφής σε συνδυασµό µε το ειδικό βάρος για τους ρότορες που περιέχουν. Σε...
  • Page 47 Kat£ th di£rkeia tou ano∂gmatoj thj suskeuas∂aj, dËste Varian den f◊rei kamm∂a euq⁄nh “son afor£ thn olikˇ ˇ merikˇ idia∂terh prosocˇ Ëste na mhn afeqe∂ kai p◊sei to Turbo-V 2K-G aq◊thsh twn odhgiËn, thn akat£llhlh crˇsh ek m◊rouj kai na mhn uposte∂ ctupˇmata ˇ donˇseij.
  • Page 48 KINDUNOS! SHMEIWSH Otan h antl∂a crhsimopoie∂tai gia thn £ntlhsh toxikËn, Η Turbo-V 2K-G δεν µπορεί να στερεωθεί µέσω της βάσης της. Το e⁄flektwn ˇ radienergËn aer∂wn, akolouqe∂te tij kat£llhlej carakthrhstik◊j diadikas∂ej tou k£qe aer∂ou. σύστηµα µπορεί να στερεωθεί µόνο µέσω της φλάντζας του ISO 250F.
  • Page 49 SHMEIWSH antl∂aj na e∂nai katËterh ap“ 50YC. Όταν τίθεται σε κίνηση η Turbo-V 2K-G για πρώτη φορά, ο controller εκκινεί αυτοµάτως το σύστηµα µε µια ειδική διαδικασία που Se per∂ptwsh bl£bhj mpore∂te na apeuqunqe∂te sto service thj Varian ˇ...

  • Page 50: Haszn¡Lati Utasõt¡S

    HASZN¡LATI UTASÕT¡S Biztons·gi ˙tmutatÛ TurbÛmolekul·ris szivatty˙khoz A turbÛmolekul·ris szivatty˙k ñ ahogy a kˆvetkező gÈpkˆnyvben le van Ìrva ñ nagy mozg·si energi·val rendelkeznek a nagy forg·si sebessÈg¸k Ès a rotorok fajlagos tˆmege miatt. A rendszer hib·s műkˆdÈse ñ pÈld·ul a rotor/·llÛrÈsz ÈrintkezÈsi hib·ja vagy ak·r a forgÛrÈsz szÈttˆrÈse ñ...
  • Page 51 A Turbo-V 2K-G-t k¸lˆnleges vÈdőcsomagol·sban sz·llÌtj·k. Ha A felhaszn·lÛnak a berendezÈs műkˆdtetÈse előtt el kell ez sÈr¸lÈs jeleit mutatja, ami sz·llÌt·s kˆzben felmer¸lhet, olvasnia ezt a gÈpkˆnyvet Ès a Varian ·ltal biztosÌtott b·rmely forduljon a helyi szolg·ltat·si irod·hoz. inform·ciÛt. A Varian nem vonhatÛ felelőssÈgre olyan A rendszer kicsomagol·sakor ¸gyeljen arra, hogy ne ejtse le,...
  • Page 52 Ha az Ar-nÈl nehezebb g·zokat kell szivatty˙znia, kÈrem, inform·ciÛÈrt forduljon a Varian műszaki t·mogat·shoz. MEGJEGYZ…S A Turbo-V 2K-G nem rˆgzÌtehető az alapj·val. A rendszer csak ISO 250F karim·val rˆgzÌthető. A rˆgzÌtÈst az ISO 1609 norma szerint kell vÈgezni. Legal·bb 500 N/mm teherbÌr·si oszt·ly˙...
  • Page 53 MEGJEGYZ…S le·ll, Ès amÌg a szivatty˙ fel¸letÈnek hőmÈrsÈklete 50 YC al· esik. Amikor legelőszˆr futtatja a Turbo-V 2K-G-t, a vezÈrlő egysÈg automatikusan elindÌtja a rendszert egy k¸lˆnleges elj·r·ssal, amely vÈdi a csap·gyakat az esetleges sÈr¸lÈsektől (SOFT Meghib·sod·s esetÈn lÈpjen kapcsolatba a helyi Varian START).

  • Page 54: Instrukcja Uzytkowania

    INSTRUKCJA UZYTKOWANIA WskazÛwki dotyczące bezpieczeństwa Pomp Turbomolekularnych Pompy Turbomolekularne opisane w niniejszej Instrukcji Obsługi posiadają wysoką energię kinetyczną spowodowaną bardzo wysoką prędkością obrotÛw razem z masą właściwą wirnikÛw. W przypadku uszkodzenia systemu, na przykład z powodu kontaktu między wirnikiem a stojanem lub z powodu pęknięcia wirnika, energia obrotowa może być...
  • Page 55 Podczas operacji rozpakowywania, należy zwrÛcić szczegÛlną lub całkowitego braku przestrzegania instrukcji, w przypadku uwagę aby nie spowodować upadku systemu Turbo-V 2K-G ani niewłaściwego użytkowania przez nieprzeszkolony personel, w nie poddawać go uderzeniom lub wibracjom.
  • Page 56 W obecności pÛl elektromagnetycznych pompa musi być uszkodzenia ciała na osobach. odpowiednio zabezpieczona przez odpowiednie ekranowanie. W celu szczegÛłowego zapoznania się z tematem patrz UWAGA ! dodatek ìInformacje Techniczneî Turbo-V 2K-G musi być podłączony do głÛwnej pompy (patrz Unikać uderzeń, wahań gwałtownych przesunięć...
  • Page 57 Jak zatrzymać Turbo-V 2K-G wartość 0,1 mbar Aby zatrzymać pompę można zastosować jeden z niniejszych dostraczyć do Turbo-V 2K-G sygnał STARTU w jeden z sposobÛw: następujących sposobÛw: podłączyć konektor I/O na wyposażeniu wyjmując konektor I/O na wyposażeniu przesyłając sygnał...

  • Page 58: Přõručka K Pouéitõ

    PŘÕRUČKA K POUéITÕ BezpečnostnÌ n·vod Turbomolekul·rnÌ v˝věvy Turbomolekul·rnÌ v˝věvy, jak jsou popisov·ny v n·sledujÌcÌm n·vodu, obsahujÌ velkÈ mnoûstvÌ kinetickÈ energie dÌky vysokÈ ot·čivÈ rychlosti v kombinaci s konkrÈtnÌm objemem jejich rotorů. V přÌpadě systÈmovÈ nefukčnosti, např. kontaktu rotoru anebo statoru nebo při zhroucenÌ rotoru můûe dojÌt k uvolněnÌ...
  • Page 59 PŘÕPRAVA K INSTALACI Toto zařÌzenÌ je určeno pro odbornÌky. Uûivatel by si měl před ZařÌzenÌ Turbo-V 2K-G se dod·v· ve speci·lnÌm ochrannÈm pouûitÌm zařÌzenÌ přečÌst tento n·vod a vöechny dalöÌ informace obalu. Pokud toto balenÌ vykazuje zn·mky poökozenÌ, k němuû...
  • Page 60 PŘÕRUČKA K POUéITÕ INSTALACE VAROV¡NÕ Podle směrnice EN 61010-1 patřÌ v˝věva Turbo-V 2K-G do  druhÈ elektroinstalačnÌ (nebo přepěťovÈ) třÌdy. ZařÌzenÌ připojte V›STRAHA! do nap·jecÌ sÌtě, kter· splňuje uvedenou třÌdu. Kvůli svÈ hmotnosti je třeba při manipulaci s v˝věvou pouûÌvat V˝věva Turbo-V 2K-G je vybavena vstupnÌmi a v˝stupnÌmi...
  • Page 61 "TechnickÈ informace"). 485" v přÌloze "TechnickÈ informace"). NouzovÈ zastavenÌ  Chcete-li v˝věvu Turbo-V 2K-G v nouzovÈ situaci okamûitě V›STRAHA! zastavit, je třeba přeruöit sÌťovÈ nap·jenÌ. Jakmile bude připojeno nap·jenÌ a zasunut souhlasn˝ 15- kolÌkov˝ konektor dodan˝ v˝robcem, v˝věva Turbo-V 2K-G se ⁄DRéBA...

  • Page 62: N¡Vod K Pouéitiu

    N¡VOD K POUéITIU Bezpečnostn˝ n·vod Turbomolekul·rne v˝vevy Turbomolekul·rne v˝vevy, ak s˙ n·sledovne popisovanÈ, obsahuj˙ veĺkÈ mnoûstvo kinetickej energie vďaka vysokej ot·čavej r˝chlosti v kombin·cii s konkretn˝m objemom ich rotorov. V prÌpade systÈmovej poruchy, napr. pri kontaktu rotora/statora alebo pri zr˙caniu rotora sa moûe uvolniť...
  • Page 63 VäEOBECN… INFORM¡CIE PRÕPRAVA NA INäTAL¡CIU Toto zariadenie je určenÈ pre profesion·lnych pracovnÌkov. Turbo-V 2K-G je dodan˝ v öpeci·lnom ochrannom obale. Ak je SkÙr neû začnete zariadenie pouûÌvať, prečÌtajte si n·vod na balenie poökodenÈ (čo sa mÙûe stať naprÌklad počas prepravy), pouûitie a vöetky ďalöie pokyny spoločnosti Varian.
  • Page 64 Pre zÌskanie ˙rovne ochrany IP-54 pouûite dodanÈ protikusy konektorov. UPOZORNENIE Presvedčite sa, či zariadenie, pripojenÈ k Turbo-V 2K-G m· adekv·tnu izol·ciu aj pre prÌpad samostatnej chyby podľa Neodstraňujte priskrutkovan˝ ochrann˝ kryt skÙr, neû pripojÌte smernice EN 61010-1. turbov˝vevu k systÈmu.
  • Page 65 (interval asi 200 ms): chybov˝ stav vyčerpajte v·kuov˙ komoru na 0,1 mbar Ako zariadenie zastaviť Dajte sign·l pre spustenie v˝vevy Turbo-V 2K-G jedn˝m z V˝vevu mÙûete zastaviť jedn˝m z nasleduj˙cich spÙsobov: nasledovn˝ch spÙsobov. odpojenÌm dodanÈho I/O konektora opačnÈho pohlavia pripojenÌm dodanÈho protikusu I/O konektora...

  • Page 66: Varnostna Navodila

    NAVODILA ZA UPORABO Varnostna navodila Turbomolekularne črpalke Turbomolekularne črpalke, opisane v naslednjih navodilih vsebujejo veliko količino kinetične energije zaradi visoke hitrosti v povezavi s specifičnimi masami rotorjev. V primeru nepravilnega delovanje sistema, na primer pri dotiku rotorja/statorja ali poökodbe rotorja se lahko sprosti rotacijska energija. ...
  • Page 67 SPLOäNE INFORMACIJE PRIPRAVA ZA MONTAéO Oprema je namenjena za profesionalno uporabo. Pred uporabo Naprava Turbo-V 2K-G je dobavljena v posebni zaöčitni emba- mora uporabnik prebrati navodila za uporabo in vse dodatne laûi. Če je embalaûa poökodovana, kontaktirajte lokalno proda- informacije, ki mu jih je posredoval Varian. Varian ni odgovoren jno pisarno.
  • Page 68 NAVODILA ZA UPORABO MONTAéA POZOR Po direktivi EN 61010-1 spada Turbo-V 2K-G v skupino za  drugo nameöčanje (ali prekovoltaûo). Napravo priljučite na OPOZORILO napetost, ki je v vskladu z zgornjo kategorijo. Zaradi teûe je treba za rokovanje s črpalko uporabiti primerne Naprava Turbo-V 2K-G ima vhodne/izhodne in serijske pri- naprave za premikanje.

  • Page 69: Vzdréevanje

    "RS232/RS 485 Opis komunikacij" v prilogi komunikacij" v prilogi "Tehničnih informacij"). "Tehničnih informacij"). Zaustavitev v sili  Za zaustavitev naprave Turbo-V 2K-G v sili morate odstraniti OPOZORILO napetost. Ko je dovedena napetost in je vstavljen tovarniöko privzeti 15 pin se Turbo-V 2K-G samodejno zaûene.

  • Page 70: Instructions For Use

    INSTRUCTIONS FOR USE Safety Guideline Turbomolecular Pumps Turbomolecular pumps as described in the following operating manual contain a large amount of kinetic energy due to the high rotational speed in combination with the specific mass of their rotors. In case of a malfunction of the system for example rotor/stator contact or even a rotor crash the rotational energy may be released.

  • Page 71: General Information

    PREPARATION FOR INSTALLATION This equipment is destined for use by professionals. The user The Turbo-V 2K-G is supplied in a special protective packing. If should read this instruction manual and any other additional this shows signs of damage which may have occurred during information supplied by Varian before operating the equipment.
  • Page 72 Use the provided mating connectors in order to maintain the IP- 54 protection level. Be sure that the insulation of the device connected to the Turbo-V 2K-G is adequate even in the case of single fault as CAUTION per directive EN 61010-1.

  • Page 73: How To Stop The System

    11. pump the vacuum chamber down to 0.1 mbar How to stop the system 12. give the Turbo-V 2K-G a start signal by one of the follow- To stop the pump you can use one of the following methods: ing methods:...

  • Page 74: Description Of The Turbo-V 2K-G

    TECHNICAL INFORMATION DESCRIPTION OF THE TURBO-V 2K-G Pump Description The Turbo-V 2K-G pumping system consists of a The pump consists of a high frequency motor driv- pump with a dedicated controller fixed to it. The ing a turbine fitted with 5 bladed stages and 2 system has an ISO 250 F high vacuum flange.

  • Page 75: Controller Description

    TECHNICAL INFORMATION where: • Tb = upper bearing temperature • Tbody = measured water cooling related tem- perature • Tbody,lim = body temperature corresponding to Twater,max, according to Figure 2 • WIN.118 = set the body temperature control Controller Description The dedicated controller is a solid-state frequency converter which is driven by a single chip micro- computer.
  • Page 76 NOTE Max input power: 850 VA Stand-by power: 30 to 35 W When the Turbo-V 2K-G has been stored at a tem- Max operating perature less than 5LC, wait until the system has power: 400 W for Nitrogen and lighter...
  • Page 77 TECHNICAL INFORMATION Throughput and power curves for Argon (power limit 350 W) - Data with 80 m /h primary pump. Throughput and power curves for Nitrogen (power limit 400 W) - Data with 80 m /h primary pump. 87-900-968-01(C)

  • Page 78: Turbo-V 2K-G Outline

    TECHNICAL INFORMATION TURBO-V 2K-G OUTLINE The following figure shows the Turbo-V 2K-G outlines (dimensions are in mm [inches]). INTERCONNECTIONS PIN N. SIGNAL NAME INPUT/ ISOLATION The following paragraphs describe the Turbo-V OUTPUT 2K-G interconnections. START/STOP (+) Optocoupled J1 ñ REMOTE I/O...

  • Page 79: Soft Start

    TECHNICAL INFORMATION The ìLow Speedî function can also be activated by Signals description serial line with win.001, and the low speed value can be adjusted via serial command win.117. START/STOP: input signal to start or stop the pump. With the supplied cover connector the Both low speed value (win.117) and high-speed START/STOP (+) signal is connected to the +24 value (win.120) are limited between 475Hz (canít...
  • Page 80 TECHNICAL INFORMATION FAULT: this relay output signal is closed when any Electrical connections examples: system fault condition is detected. To detect the type of failure the serial protocol is needed (see • Start-Stop or Interlock the para. "RS232-485 Comunication Description"). SET POINT: this relay output signal is enabled when the reference quantity chosen (frequency, cur- rent or time) is higher than the set threshold.

  • Page 81: J2 - Serial

    RESERVED A serial communication kit with a serial cable and the Navigation software is available (optional). SERIAL CABLE INSTALLATION In order to maintain the IP-54 protection level, please use a certified IP-54 connector or the one provided by Varian. 87-900-968-01(C)

  • Page 82: Rs 232/Rs 485 Communication Description

    TECHNICAL INFORMATION − <DATA> = an alphanumeric ASCII string with RS 232/RS 485 COMMUNICATION DESCRIPTION the data to be written into the window. In case of a reading command this field is not present. Both the RS 232 and the RS 485 interfaces are The field length is variable according to the available on the connector P2.
  • Page 83 TECHNICAL INFORMATION The controller can answers with the following re- Command: STOP Source: PC sponse types: Destination: Controller TYPE LENGTH VALUE DESCRIPTION After a read instruction Logic 1 byte of a logic window STX ADDR WINDOW OFF ETX After a read instruction Numeric 6 bytes of a numeric window...

  • Page 84: Window Meanings

    TECHNICAL INFORMATION Command: READ PUMP STATUS Read/ Data Description Admitted Source: PC Write Type Values Destination: Controller (with address = 3) Set Point (default = 500) threshold (expressed in Hz, mA or s) STX ADDR WINDOW Set Point 0 to 99999 mask: time (default = 0) between the...
  • Page 85 Read/ Data Description Admitted Write Type Values Write Type Values Reserved to Varian service Pump tem- 0 to 70 perature in Valves oper- 0 = auto (default) ating mode 1 = on command Pump status Stop = 0 Waiting intlk = 1 (see win.146)

  • Page 86: Monitorr

    In order to install and operate the MoniTorr card of At pumpís power-on, the POWER LED comes on the Turbo-V 2K-G itís necessary to get the Monitor and the system proceeds with its self-configuration Connectivity Kit (P/N 969-9260). The user should routine.

  • Page 87: Monitorr Connectivity Kit Installation Procedure

    TECHNICAL INFORMATION MoniTorr Connectivity Kit Installation Proce- dure Install the File VT Serial Address Configurator on PC (launch VT-SAC\setup.exe on CD Rom) Connect the RS232 cable between the PC serial port and the first TV 2KG serial port 10. Check if Baud Rate of protocol converter is fixed at 115K2 (switch between 9 position and F position) 3.

  • Page 88: Interconnections

    TECHNICAL INFORMATION In the two cases the following screen will be dis- Interconnections played on the personal computer: The following figure shows the Monitorrís intercon- nections. Network Connector (RS 485) Close all the applications and then select OK. The following screen will now be displayed on the per- Network connector (RS-485) sonal computer monitor: In order to have the IP-54 environment protection...

  • Page 89: Operating Procedure

    If a change is required, click the right It is suggested that you maintain the proposed mouse button with the cursor on the Varian logo program group so as to facilitate the identification on the right-hand side of the windows bar.

  • Page 90: Archive Saving Method Procedure

    The option works as a bi-directional bridge be- • Alarm time: Defines the timeout after which an tween the ProfiBus network and the Varian turbo alarm condition is signalled. controller internal link. The interface provides input data (measures) and output data (commands) to...

  • Page 91: Configuration

    TECHNICAL INFORMATION Each device has its own state machine to manage Configuration the device operation. Before power-on the controller set the Profibus address by the 2 rotary switches. Up to 126 different addresses (from 0 to 125) can be selected. The address value sets by the 2 switches is expressed in hexadecimal notation, so value from 00 to 7D are permitted;...

  • Page 92: Profibus Message Mapping

    TECHNICAL INFORMATION The two machines continuously share I/O data slave configuration and reads back the entire slave with the relative bus, and interact each other only status. in following conditions: For this purpose one Input (from slave to master) • and one Output (from master to slave) buffers are ProfiBus Data Exchange is suspended (static provided.
  • Page 93 B7 - Reserved - B0.. B1 - Reserved - B2.. B3 - Start/Stop/Interlock Mode Change the logic of Start/stop and Interlock inputs. Ask to Varian personnel for this option B4.. B5 - Set Point Type 0 = frequency 1 = current...
  • Page 94 TECHNICAL INFORMATION OUTPUT BUFFER (5 BYTES) OFFSET SIZE UNIT RANGE DESCRIPTION BYTE BYTE SERIAL B7 ñ Start/Stop 0 = Stop 1 = Start B6 ñ Low Speed 0 = off (set the ìtarget speedî(In Buff byte-8) atî high speedî (Out. Buff. byte-1)) 1 = on (set the ìtarget speedî...
  • Page 95 TECHNICAL INFORMATION INPUT BUFFER (15 WORDS) OFFSET SIZE UNIT RANGE DESCRIPTION BYTE BYTE SERIAL 0-10000 Current Motor current consumption 0-500 Power Motor power absorption 0-400 Power Limit Applied Maximum allowable power 0-555 Driving Frequency Read the rotational speed of the pump 0-555 Target Frequency Read the target rotational speed...
  • Page 96 TECHNICAL INFORMATION OFFSET SIZE UNIT RANGE DESCRIPTION BYTE BYTE SERIAL B4 ñ Verify Line Select (the auto voltage selection mismatch the real input voltage) B3 ñ Power Fail (internal circuitry failure) B2 ñ Controller Over-Temperature (ìController Power Section Temperatureî or ìController CPU Section Tem- perature"...

  • Page 97: Diagnostic Management

    TECHNICAL INFORMATION Diagnostic management Diagnostic buffer In addition to the ProfiBus six byte standard diag- nostic, the interface provides both user diagnostic MEANING and static diagnostics functions station non exist (set by master) station not ready (slave not ready for The standard diagnostic management is fully com- data exchange) pliant with the ProfiBus specification.

  • Page 98: Inlet Screen Installation

    TECHNICAL INFORMATION MEANING Vent/Purge Auto/Man diag status 7 - 4 Vent/Purge Remote/Profibus diag status 3 - 0 Interlock Mode diag status 7 - 4 Set Point Logic diag status 3 - 0 Heater Jacket Mode diag status 7 - 4 Load Gas Type diag status 3 - 0 Purge Gas Type diag status...

  • Page 99: Pump Purging And Venting

    Turbo-V vent valve opened, to PUMP PURGING AND VENTING avoid system overpressures. If the vent valve The Turbo-V 2K-G pump is equipped with an inte- canít be kept opened, the backing pump grated purging and venting valve device. Both should be left operating.

  • Page 100: High Vacuum Flange Connection

    HIGH VACUUM FLANGE CONNECTION PUMP USED IN PRESENCE OF MAGNETIC FIELDS To connect the Turbo-V 2K-G pump to the ISO F inlet flange position the integrated inlet screen - Magnetic fields induce eddy currents in the rotor of centering ring as shown in the figure.

  • Page 101: Customer Information

    NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product.
  • Page 102 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
  • Page 103 Fax: (82) 2 3452 2451 Korea China Mexico Tel: (82) 2 3452 2452 (dedicated line) Varian Technologies - Beijing Varian, S. de R.L. de C.V. vtk.technical.support@varianinc.com Room 1201, Jinyu Mansion Concepcion Beistegui No 109 No. 129A, Xuanwumen Xidajie Col Del Valle Xicheng District C.P.

Ce manuel est également adapté pour:

969-8871969-8873

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