Table des Matières
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Liens rapides
Turbo-V 1000 ICE
Model 969-9080
Model 969-9100
87-900-900-01(C)
APRIL 2002
pump
MANUALE DI ISTRUZIONI
BEDIENUNGSHANDBUCH
NOTICE DE MODE D'EMPLOI
MANUAL DE INSTRUCCIONES
MANUAL DE INSTRUÇÕES
BEDRIJFSHANDLEIDING
INSTRUKSTIONSBOG
BRUKSANVISNING
INSTRUKSJON MANUAL
OHJEKÄSIKIRJA
ODHGIES CRHSEWS
INSTRUCTION MANUAL
Publicité
Table des Matières
Manuels Connexes pour Varian Turbo-V 1000 ICE
Sommaire des Matières pour Varian Turbo-V 1000 ICE
- Page 1 MANUALE DI ISTRUZIONI Turbo-V 1000 ICE BEDIENUNGSHANDBUCH pump NOTICE DE MODE D’EMPLOI MANUAL DE INSTRUCCIONES MANUAL DE INSTRUÇÕES Model 969-9080 BEDRIJFSHANDLEIDING Model 969-9100 INSTRUKSTIONSBOG BRUKSANVISNING INSTRUKSJON MANUAL OHJEKÄSIKIRJA ODHGIES CRHSEWS INSTRUCTION MANUAL 87-900-900-01(C) APRIL 2002...
- Page 2 Turbo-V 1000 ICE...
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Page 5: Table Des Matières
ISTRUZIONI PER L’USO ....................1 GEBRAUCHSANLEITUNG ....................3 MODE D’EMPLOI ........................ 5 INSTRUCCIONES DE USO ....................7 INSTRUÇÕES PARA O USO ....................9 GEBRUIKSAANWIJZINGEN ..................... 11 BRUGSANVISNING ......................13 BRUKSANVISNING......................15 BRUKERVEILEDNING ...................... 17 KÄYTTÖOHJEET ......................19 PDHGIES CRHSEWS ......................21 INSTRUCTIONS FOR USE.................... -
Page 6: Informazioni Generali
ISTRUZIONI PER L'USO INFORMAZIONI GENERALI Questa apparecchiatura è destinata ad uso professionale. L'utilizzatore deve leggere attentamente il presente manuale di istruzioni ed ogni altra informazione addizionale fornita dalla Varian prima dell'utilizzo dell'apparecchiatura. La Varian si ritiene sollevata eventuali responsabilità dovute... - Page 7 "Technical Information" per ulteriori dettagli. Le pompe turbomolecolari della serie Turbo-V1000 ICE devono PERICOLO! essere utilizzate solo con uno degli appositi controllori Varian Quando la pompa viene utilizzata per il pompaggio di gas (serie 969-9447, 969-9547) e devono essere collegate ad una tossici, infiammabili o radioattivi, seguire le appropriate pompa primaria (vedere schema in "Technical Information").
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Page 8: Vor Der Installation
Nichtbeachtung -auch teilweise- der enthaltenen Hinweise, unsachgemäßem Gebrauch durch ungeschultes Personal, nicht autorisierten Eingriffen und Mißachtung der einheimischen, hier zur Geltung kommenden Bestimmungen übernimmt die Firma Varian keinerlei Haftung. Bei den Pumpen der Serie Turbo-V1000 ICE handelt es sich Turbomolekularpumpen für Hoch- Ultrahochvakuumanwendungen. - Page 9 ANMERKUNG müssen in die Bohrungen des Unterteils 3 M6-Schrauben ein- gesetzt werden. Die Schrauben müssen eine Dehngrenze von Vor dem Versand einer defekten Pumpe an die Fa. Varian muß 550 N/mm haben und mit einem Anzugsmoment 4,5 Nm an- das Formular "Sicherheit und Gesundheit", das diesem Hand- gezogen werden.
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Page 10: Indications Générales
Varian, avant d'utiliser l'appareil. Varian décline par conséquent toute responsabilité en cas d'inobservation totale ou partielle des instructions données, d'utilisation incorrecte de la part d'un personnel non formé, d'opérations non autorisées ou d'un emploi contraire aux... -
Page 11: Utilisation
4,5 Nm. Pour l'installation des accessoires en option, voir "Technical réparations ou un "advanced exchange service", remplir et faire parvenir au bureau local Varian la fiche "Sécurité et Santé" Information". annexée à la présente notice d'instructions. Une copie de cette fiche devra être mise dans l'emballage de la pompe avant... -
Page 12: Información General
Varian antes de utilizar el equipo. Varian se considera libre de cualquier responsabilidad debida al incumplimiento total o parcial de las instrucciones, al uso poco... - Page 13 Las bombas turbomoleculares de la serie Turbo-V1000 ICE se deberán utilizar sólo con uno de los controladores apropiados ¡PELIGRO! Varian (serie 969-9447, 969-9547) y se deberán acoplar a una Cuando la bomba se utiliza para bombear gases tóxicos, bomba primaria (véase esquema en "Technical Information".
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Page 14: Instruções Para O Uso
Varian antes de usar a aparelhagem. A Varian não se responsabiliza pela eventual inobservância total ou parcial das instruções, pelo uso indevido por parte de pessoas não treinadas, por operações não autorizadas ou pelo uso contrário às normas... - Page 15 M10 Em caso de defeito é possível usufruir do serviço de reparação Varian ou do "Varian advanced exchange service", que permite Para fixar a bomba através da sua base, é necessário utilizar obter uma bomba regenerada que substitua a bomba com três parafusos M6 fixados aos furos específicos existentes na...
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Page 16: Gebruiksaanwijzingen
Varian verstrekte informatie door te lezen alvorens het apparaat in gebruik te nemen. Varian acht zich niet aansprakelijk voor de gevolgen van het niet of gedeeltelijk in acht nemen van de aanwijzingen, onoordeelkundig gebruik... - Page 17 In geval van storing is het mogelijk om de reparatiedienst van Enkelvoudige klem met 23 Nm Varian of de "Varian advanced exchange service" in te M10 schroefdraad schakelen: zo krijgt men een ruilpomp ter vervanging van de defecte pomp.
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Page 18: Brugsanvisning
Brugeren bedes læse denne håndbog samt enhver yderligere vejledning, Varian har leveret, inden udstyret tages i brug. Varian er ikke ansvarlig, hvis vejledningen ikke er nøje fulgt, eller hvis den kun er delvist fulgt, og heller ikke hvis udstyret anvendes forkert af ukvalificeret personale, hvis der foretages uautoriserede indgreb på... - Page 19 “Technical Information” for yderligere detaljer. Turbomolekulærpumperne i Turbo-V1000 ICE serien må kun ADVARSEL! anvendes med en af de særlige Varian kontrolapparater (serie Når pumpen anvendes til pumpning af giftige, brandfarlige eller 969-9447, 969-9547) og skal forbindes med en primær pumpe radioaktive gasser, skal de gældende forskrifter for den enkelte...
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Page 20: Bruksanvisning
Användaren bör läsa denna bruksanvisning, samt övrig dokumentation från Varian före användning av utrustningen. Varian tar inget ansvar för skador helt eller delvis till följd av åsidosättande av instruktionerna, olämplig användning av person utan tillräcklig kunskap, obehörigt bruk av utrustningen eller hantering som strider mot gällande lokala föreskrifter. - Page 21 Då pumpen används för pumpning av giftiga, lättantändliga Turbomolekylärpumparna i serien V1000 ICE måste användas eller radioaktiva typ, bör man följa de särskilda anvisningarna med en särskild styrenhet från Varian (serie 969-9447, 969- för varje enskild gas. 9547), och anslutas till en förpump (se schemat " Technical Använd ej pumpen i närheten av explosiva gaser.
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Page 22: Brukerveiledning
Dette utstyret er beregnet til bruk av profesjonelle brukere. Brukeren bør lese denne brukerveiledningen og all annen informasjon fra Varian før utstyret tas i bruk. Varian kan ikke holdes ansvarlig for hendelser som skjer på grunn av manglende oppfølging av disse instruksjonene, selv delvis, feilaktig bruk av utrent personell, ikke autoriserte endringer av utstyret eller handlinger som på... - Page 23 Turbo-V1000 ICE serien turbo-molekulære pumper må kun Når pumpen brukes for å pumpe giftige, brannfarlige eller brukes med en av de spesielle Varian kontrollere (serie 969- radioaktive gasser skal de relevante forskriftene for de enkelte 9447, 969-9547), og må koples til hovedpumpen (se skjema i gasstypene følges.
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Page 24: Käyttöohjeet
Tämä laite on tarkoitettu ammattimaiseen käyttöön. Ennen laitteen käyttöönottoa tulee käyttäjän lukea huolellisesti mukana seuraava käyttöohje sekä kaikki muu Varianin toimittama lisätieto. Varian ei ota vastuuta seurauksista, jotka johtuvat laitteen käyttöohjeiden täydestä tai osittaisesta laiminlyönnistä, ammattitaidottoman henkilön virheellisestä laitteen käytöstä, valtuuttamattomista toimenpiteistä... - Page 25 Lisätietoja löytyy “Technical Information“-liitteestä. VAARA! Sarjan V1000-ICE turbomolekyylipumppuja tulee käyttää Jolloin pumppua käytetään myrkyllisten, tulenvaarallisten ja ainoastaan niihin sopivien varian valvojien kanssa (sarja 969- radioaktiivisten kaasujen pumppaamiseen tulee seurata joka 9447, 969-9547) niiden täytyy olla yhdistettyinä kaasuun sopivaa menettelytapaa.
- Page 26 Varian, prin apÒ th crhsimopo∂hsh thj suskeuˇj. H Varian den f◊rei kam∂a euqÚnh Òson afor£ thn olikˇ ˇ merikˇ aq◊thsh twn odhgièn, thn akat£llhlh crˇsh ek m◊rouj anekpa∂deutou proswpikoÚ, auqa∂retej epemb£seij ˇ crˇsh pou den sumfwne∂ me touj eidikoÚj eqnikoÚjkanonismoÚj.
- Page 27 Gia na stereèsete thn antl∂a m◊sw thj b£shj thj e∂nai apara∂thto na crhsimopoiˇsete treij b∂dej M6 sterewm◊nej episkeuèn Varian ˇ sto “Varian advanced exchange service”, stij eidik◊j op◊j pou up£rcoun sth b£sh thj antl∂aj. Oi pou saj d∂nei th dunatÒthta na antikatastˇsete thn calasm◊nh antl∂a me m∂a £llh eniscum◊nh.
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Page 28: General Information
Varian before operating the equipment. Varian will not be held responsible for any events occurring due to non-compliance, even partial, with these instructions, im- proper use by untrained persons, non-authorized interference with the equipment or any action contrary to that provided for by specific national standards. - Page 29 MAINTENANCE uum chamber by means of clamps or claws. The following table The Turbo-V 1000 ICE series pump does not require any main- shows, for each flange and fixing device, the necessary number tenance. Any work performed on the pump must be carried out of clamps or claws and the relevant fixing torque.
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Page 30: Technical Information
TECHNICAL INFORMATION DESCRIPTION OF THE TURBOPUMP The turbine rotor is supported by permanently lu- bricated high precision ceramic ball bearings in- The Turbo-V1000 ICE pump is available with an stalled on the forevacuum side of the pump. ISO 200 inlet flange (model 969-9080), or with a The static blades of the stator are made of stain- CFF 10”... -
Page 31: Technical Specification
- 20° C to + 70° C Start-up time < 4 minutes Weight kg (lbs) ISO 200: 19 (41.8) Recommended mechanical: Varian DS 402 CFF 10”: 26 (57.2) forepump diaphragm: Varian MD 60 Operating position Cooling Water (use water with electrical con- * According to standard DIN 28 428, the base ductivity ≤... - Page 32 TECHNICAL INFORMATION Graph of nitrogen pumping speed vs inlet pressure Graph of compression ratio vs foreline pressure Graph of nitrogen throughput vs inlet pressure using the recommended mechanical forevacuum pump 87-900-900-01(C)
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Page 33: Inlet Screen Installation
TECHNICAL INFORMATION INLET SCREEN INSTALLATION The following figure show the overall flange di- mensions with the protection screen fitted on pump with ISO flange and pump with CFF flange. The inlet screens mod. 969-9316 prevents the blades of the pump from being damaged by debris greater than 0.7 mm diameter. -
Page 34: Water Cooling Kit Installation
TECHNICAL INFORMATION A dedicated temperature sensor into the heating jacket will keep the pump temperature at the de- sired temperature. NOTE Please make sure to have a perfect contact be- tween the heating jacket thermistor and the pump envelope for a safe and efficient operation. CAUTION If the chamber of the system is "baked"... -
Page 35: Vent Device Installation
TECHNICAL INFORMATION VENT DEVICE INSTALLATION VENT VALVE INSTALLATION The vent valve mod. 969-9833 allows to avoid un- desired venting of the pump during a temporary power failure (5 sec maximum), and enables an automatic vent operation. The vent device mod. 969-9831 allows to avoid undesired venting of the pump during a temporary Unscrew the threaded plug (see figure below). -
Page 36: Solid State Flowmeter Installation
(15 psig) to get 20 sccm. CAUTION To prevent bearing damage, the integrated purge valve is foreseen for a gas flow rate of 20 sccm (0.34 mbar l/s). Please contact Varian for specific applications. SOLID STATE FLOWMETER INSTALLATION The recommended gas flow maintains a pressure... -
Page 37: Typical Layout Diagram
Fore-vacuum pump with internal one-way valve For ConFlat flange connections we recommend 10. Fore-vacuum pump control relay using Varian hardware. Other hardware can be used if it satisfies to this specifications: 11. Connection for water cooling − stainless steel screws 12. -
Page 38: Connection Configurations
TECHNICAL INFORMATION Connection configurations Connection B - FORE-VACUUM PUMP Connection C - ELECTRICAL A flange KF 40 NW is available to connect the Tur- bopump to the fore-vacuum pump. A hose or vac- uum approved pipe can be used. If a rigid pipe is used, any vibration generated by the mechanical pump must be eliminated through the use of bel- lows. -
Page 39: Suggested Pump Installation
The heater jacket working tempera- ture should be adjusted on the pump control unit Vacuum chamber (see controller manual for reference). Ask VARIAN Rough line for proper temperature setting. Heater jacket must be always on even during start-up and shutdown. -
Page 40: Pump Used In Presence Of Magnetic Fields
300 3 phase, universal motor plied to the rotor. Forepump MD 60, 120 V 949-9411 Forepump MD 60, 220 V 949-9412 For a complete overview of Varian's extensive product lines, please refer to the Varian catalog. 87-900-900-01(C) -
Page 41: Customer Information
NOTE: If a product is received at Varian which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Varian employees as well as to any third party occurring as a result of exposure to toxic or hazardous materials present in the product. - Page 42 Request for Return FAILURE REPORT TURBO PUMPS and TURBOCONTROLLERS POSITION PARAMETERS Power: Rotational Speed: Does not start Noise Vertical Current: Inlet Pressure: Does not spin freely Vibrations Horizontal Temp 1: Foreline Pressure: Does not reach full speed Leak Upside-down Mechanical Contact Overtemperature Other: Temp 2:...
- Page 43 Tel: (39) 011 997 9111 Tel: (39) 011 997 9111 Fax: (39) 011 997 9350 Brazil Fax: (39) 011 997 9350 Varian Industria e Comercio Ltda. Japan Avenida Dr. Cardoso de Mello 1644 Internet Users: Varian Vacuum Technologies Vila Olimpia Customer Service &...